NDLI: Sound source localization based on directivity of MEMS microphones

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2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)

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Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004.

Volume 3 - 2004

2004 7th International Conference on Solid-State and Integrated Circuits Technology Proceedings - Title

Conference organization

Welcome address [ICSICT 2004]

Technologies for a mobile multimedia microprocessor

A DSP-coprocessor architecture for image/video applications [coding/decoding]

A data hazard detection method for DSP with heavily compressed instruction set

DSP architecture for motion estimation acceleration

Low power scalable DCT design based on scalers sharing multiplier [video coding applications]

Design of high speed arithmetic encoder [image coding applications]

High performance synchronous DRAMs controller in H.264 HDTV decoder

Harmonic elimination of inverters using blind signal separation

Locally self-resetting CMOS in multi-port register file design

VLSI implementation of full pixel motion estimation processor for MPEG-4 AS profile

A novel LOP to improve the normalization of the FP adder in DSPs

An novel FDWT and IDWT architecture for JPEG2000

An asynchronous data-path design for Viterbi decoder

A fast variable-length decoder with optimized lookup tables on FPGA [MPEG applications]

An efficient accelerating architecture for tier-1 coding in JPEG2000

Novel VLSI architecture of 2-D DWT/IDWT for JPEG2000 based on diagonal storage

A fast VLSI architecture for two-dimensional discrete wavelet transform based on lifting scheme [image compression applications]

Design and implementation of a parallel real-time FFT processor

VLSI implementation of fast Fourier transformation for OFDM-based high-speed wireless applications

Tunable RF MEMS elements

A high-performance strain sensing microsystem with remote RF power capability

Integrated RF MEMS inductors on thick silicon oxide layers fabricated using SiDeox process

Micromachined bulk acoustical-wave RF filters

A bulk micromachined distributed digital phase shifter for microwave phased array applications

Fabrication of edge-suspended microwave passive components using CMOS-compatible micromachining

DC-contact RF MEMS switches with bias physically insulated from RF signal

Combination of MEMS processing and electroless copper plating for a novel RF inductor

The study on a voltage controlled capacitor with complex membrane

Research of sector split-drain MAGFET (structure and model) based on standard 0.6um N-well CMOS technology

A self-packaged thermal flow sensor by CMOS MEMS technology

Novel gas sensor based on nano-zeolite films for the nerve agent simulant dimethylmethylphosphonate detection

Design of CMOS magnetic sensor integrated circuit

Temperature sensor based on quartz tuning-fork resonator

A MEMS mid-infrared thermal source for NDIR gas analyzers

Electromagnetic and mechanical analysis for micromachined filter

Design of coils inductively-tuned RF MEMS shunt switches using novel modeling method

Gas microsensors based on polymer-carbon black composites

Analysis of optimized micro-rotating-structure for MEMS

Influence of adsorption-desorption on resonant frequency of micro- and nanocantilevers

Integrated circuit based biosensor technologies for DNA-microarray applications

DNA-templated field-effect transistor

Integrated bioanalytical microsystem

Protein microarray chip with embedded microchannels

Study the characteristics of uricase biosensor based on the extended gate field effect transistor

Novel-shaped microneedle arrays for multiple uses of bio-medical applications

Fabrication of silicon-based bulk micro-machined amperometric microelectrode biosensor

Study of a novel PZT thin films based micromachined ultrasonic transducer for distance measurement

Design and fabrication of a torsional z-axis capacitive accelerometer with novel comb capacitor

The application of double-gate MOSFET mixer in digital pressure sensor

A universal sensor interface chip design in 0.5/spl mu/ CMOS process

Analysis of a MEMS gyroscope interface circuit

The research on MEMS fang-bar fluidic angular rate sensor

Double tuning-fork resonant accelerometer

A fully CMOS compatible integrated absolute pressure sensor

Study to the integrated micro piezoresistive accelerometer for high g application with amplifying circuit

Simulation and test of a novel SOI high temperature pressure sensor

A novel piezoresistive accelerometer for high accuracy and overload ability [MEMS device]

A low noise CMOS instrumentation amplifier for integrated thermal gas flow sensor

Silicon-based MEMS process and standardization

Nanofabrication from MEMS technology

MEMS- and probe-based mass data storage in conventional CMOS

Vertical profiles and CD loss control in deep RIE technology [MEMS fabrication applications]

A study on etching profiles of sacrificial layers

A novel method for in situ thermal expansion coefficient measurement of polysilicon thin films [MEMS materials applications]

Improving bonding quality in MEMS using silicon/gold/glass bonding by laser

Research on a seven-wafer Si-based combustor for micro power generation

Electrostatic microactuators fabricated using deep RIE and wafer bonding for hard disk drives

A silicon capacitive microphone based on oxidized porous silicon sacrificial technology

Torsion-mirror actuators with compound electrostatic driving structures

A novel electrostatically driven micromirror with lateral comb actuators and T-shaped torsion bars

Sound source localization based on directivity of MEMS microphones

Nodal analysis of the in-plane thermal microactuator

Investigation of fabricating ultra deep and high aspect ratio electrical isolation trench without void

An improved method employed in anodic bonded glass-silicon gyroscopes to avoid footing effect in DRIE

Electroless copper plating on silicon surface for MEMS

Measurement technique of in-plane motion for MEMS based on block matching

A practical package technique for FBG-based temperature independent sensor

An improved electrostatically-driven micro torsion mirror fabricated by silicon micromachining for optical switching devices

A novel electro-thermal actuated micro position lock

Numerical analysis of pull-in voltage in contact MEMS switch with double actuated electrodes

Transport based equivalent circuit models for waveguiding structures on a semiconductor substrate

Input collapse of CMOS logic gates with a series-connected MOSFET chain

Bipartition for 2.5-D floorplanning based on corner block list representation

Optimal wire sizing in early-stage design of on-chip power/ground (P/G) networks

Grid-based wire resource estimation for the physical synthesis

A novel Monte-Carlo method for FPGA architecture research

Algorithm for post global routing RLC crosstalk avoidance

EQUADI: a linear complexity algorithm for transient analysis for power/ground (P/G) networks in ASICs

Energy-aware supply and body biasing voltage scheduling algorithm

Mapping concurrent applications to a NoC

Research on the routing algorithm of SRAM-based FPGA

System level asynchronous virtual pipeline on dynamically and partially reconfigurable architecture

An average performance analysis method for asynchronous data-path

Will CMOS imagers ever need ultra-high speed?

Optical MEMS technology for telecommunication

Liquid crystal on silicon microdisplays

Method of LTPS TFT with fin-like structure and its channel self-selective enhanced crystallization

A fast, high resolution CMOS imager for nanosecond light pulse detections

Research on the novel photo-controlled oscillator

A novel bias circuit design in low power LCD driver

On-chip display data RAM in LCD/OLED driver/control ICs for mobile application

The characteristics and simulation of photo-bidirectional negative resistance transistor (PBNRT)

Structural optimizations of SOI-based single-mode rib waveguide bends [optical waveguides]

A low power consumption thermo-optic variable optical attenuator based on SOI material

The effect of Fabry-Perot interference on the packaging of SOI-based optoelectronic devices

Improved diphasic nc-Si/a-Si:H I-layer materials using PECVD [p-i-n junction solar cell applications]

Challenges to the low power technology for future system LSIs

On high noise immunity CMOS design scheme with low leakage power consumption

PCI Express multi-lane de-skew logic design using embedded SERDES FPGA

FPGA implementation of GF (P/sup m/) exponentiation for digital signature and authentication scheme

Pseudorandom scan BIST using improved test point insertion techniques

A proposed strategy for testing and verification of complex chip [uses EM signatures]

A complete BIST scheme for ADC linearity testing

A functional verification method for pipelined DSP

A high performance VLSI chip of the elliptic curve cryptosystems

Scalar point multiplication using redundant recoding in elliptic curve cryptosystems

VLSI design and implementation of a fuzzy logic controller for engine idle speed

A new precomputation architecture of sequential logic circuits for low power

Design of a QPSK demodulator for DVB-S receiver ASIC chip

FPGA implementation of digital IF processing in HFGWR

An efficient framework for accelerating functional verification of microprocessor

A test implementation approach for VLSI testable design

ERCCL: energy recovery capacitance coupling logic

A 16/spl times/16+32 bit multiplication accumulator design adaptable to technology portability

An IEEE floating-point adder for multi-operation

Bipolar transistors on thin SOI: concept, status and prospect

SiGe HBT design tradeoffs between small signal and large signal RF performance

SiGe HBTs for ultra-high speed applications

Hot carrier reliability of a SiGe/Si hetero-interface in SiGe/Si-hetero-MOSFETs

RF and microwave power amplification using SiGe HBTs: issues and prospects

Ge concentration profiles and defect characterization in high Ge content Si/SiGe heterostructure

Nano-structured multi-layer SiGe alloy grown by ultra high vacuum chemical vapor deposition

Cascadable direct-coupled wideband SiGe HBT MMIC [amplifier]

An RF low-noise broadband amplifier processed in 0.35um SiGe technology

Evaluation of interface states and minority carrier generation lifetime for strained Si/SiGe wafers using transient capacitance method

Development of high f/sub MAX/ SiGe HBT with air-bridge

Analysis of negative differential resistance (NDR) characteristics induced by self-heating effects in power Si/SiGe/Si double heterojunction bipolar transistors (DHBTs)

MBE-based materials growth for high f/sub T/ SiGe HBT

Preparation of thin strained Si film by low temperature Ge ion implantation and high temperature annealing

The heterogeneous integration approach for advanced semiconductor materials and microsystems

Recent advances and applications of plasma immersion ion implantation

Review on epitaxial crystal growth on compliant substrate

Fabrication of silicon on plasma synthesized SiO/sub x/N/sub y/ by ion-cut process

Ge condensation characterization of SiGe-on-insulator structure fabricated by separation of oxygen implantation

Measurement of the thermal conductivity of undoped polysilicon thin film over 300K to 400K

Noise-analyzing of piezoresistive silicon materials

Industrial growth of lithium tetraborate (Li/sub 2/B/sub 4/O/sub 7/) piezocrystal and its SAW applications

Characterization and properties of lanthanum-substituted bismuth titanate ferroelectric thin films for FeRAM application

Frequency dependence of the dielectric properties and coercive field of SrBi/sub 2/Ta/sub 2/O/sub 9/ thin films

Fabrication and characterization of silicon on permalloy film

The effect of calcination temperature on nanosized tin oxide thin film

Hole mobilities in the Si/SiGe grown on nanometer SOI of SIMOX [MOSFET example]

Effect of sputtering on depositing platinum by focused ion beam

Electrical properties of Ba/sub 0.8/Sr/sub 0.2/TiO/sub 3/ thin film with NTC effect [thin film resistor]

Present status and challenges of AlGaN/GaN HFETs

Novel microwave-induced zero-resistance states in the two-dimensional electron system

Implementation of CMRC on HBT power amplifier for WCDMA application

0.15 /spl mu/m PHEMT 80 Gb/s selector

High yield, high uniformity, high performance 50 nm T-gate In/sub 0.52/Al/sub 0.48/As/In/sub 0.70/Ga/sub 0.30/As HEMT process

Novel InSb-based quantum well transistors for ultra-high speed, low power logic applications

GaN-based radio-frequency planar inter-digitated metal-insulator-semiconductor varactors

Studies of high field transport in GaN/AlGaN heterostructures

Performance of AlGaN/GaN heterostructure FETs over temperatures

Influence of relaxation on the two-dimensional electron-gas in Al/sub x/Ga/sub 1-x/N/GaN/Al/sub y/Ga/sub 1-y/N double heterostructure with compressively strained GaN layer

Development of metamorphic InP/InGaAs double heterojunction bipolar transistors (HBTs) on GaAs substrate for microwave applications

Instability of the induced potential distribution in undoped AlGaN/GaN HEMTs and SiC transistor structures

The annealing effect of Schottky contact on AlGaN/GaN

The temperature characteristics of AlGaN/GaN double heterostructure HEMTs

AlGaN/GaN heterostructures: the dependences of electron density and mobility on barrier alloy composition

Liquid phase oxidation on GaAs-based materials and the applications

Transport properties of the two-dimensional electron gas in Al/sub x/Ga/sub 1-x/N/GaN heterostructures

InGaP/InGaAs/GaAs metal-oxide-semiconductor pseudomorphic high electron mobility transistor with a liquid phase oxidized InGaP gate

Investigation of InGaP/GaAs double heterostructure-emitter bipolar transistor with multiple negative-differential-resistance switches

Drain-induced barrier lowering effect and its dependence on the channel doping in 4H-SiC MESFETs

Decrease in interface states density of 4H-SiC MOS under high electric field stress

Optimization of device structure of SiCOI MESFET with dielectric groove isolation

Activation of beryllium-implanted gallium nitride by combined pulse laser and rapid thermal annealing

High-quality InGaAsP grown on GaAs by solid source molecular beam epitaxy with a GaP decomposition source

Vertical field HMSM photodetector

Influence of InP cap layer on photo-responsivity of InP/InGaAs PIN detector

MOVPE growth of 980nm VCSEL using optical in-situ techniques

Study on intra-cavity contacted oxide-confined vertical cavity surface emitting laser

Simulation study of 1.2 kV 4H-SiC DIMOSFET structures

Dependence of nitrogen incorporation of GaNAs alloys to growth conditions

Homoepitaxial growth and hot-wall low-pressure chemical vapor deposition reactor MOS structures of 4H-SiC on off-oriented n-type (0001) Si-faces

300 mm silicon crystal growth and wafer processing

Defect engineering in silicon used for ultra large-scale integrated circuits

ZnO thin films growth, characteristics and applications

Power dissipation of ZnO-based metal oxide varistors (MOVs) for electronic circuit protection

Hetero-epitaxial growth of ZnO films on silicon by low-pressure metal organic chemical vapor deposition

Comparative study of ZnO and GaN films grown by MOCVD

Convertibility of conduction type in Al-N codoped ZnO thin films based on DC reactive magnetron sputtering

Helium implant depth dependence on thermal growth of nanocavities in silicon

Erbium-doped silicon grown by molecular beam epitaxy

Correlation of oxygen precipitation and void annihilation in nitrogen-doped Czochralski silicon

Effect of the V-O complexes on oxygen precipitation in neutron-irradiated silicon

[Inside back cover - blank]

ISBN0-7803-8511-X [Back Cover]

Volume 2 - 2004

Volume 1 - 2004

2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443)

1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105)

Proceedings of 4th International Conference on Solid-State and IC Technology

Sound source localization based on directivity of MEMS microphones

Content Provider	IEEE Xplore Digital Library
Author	Xiaoming Wu Tianling Ren Litian Liu
Copyright Year	2004
Description	Author affiliation: Inst. of Microelectron., Tsinghua Univ., Beijing, China (Xiaoming Wu; Tianling Ren; Litian Liu)
Abstract	MEMS technology based microphones have gradually been commercialized. These microphones have many virtues of small size, high sensitivity, flexible packaging, and so on. The paper proposes a novel and simple method for sound source localization using the directivity of MEMS microphones. The multi-microphone structure, signal processing algorithm, and system error depression technology of the method are presented. Theoretically, the maximum sound source localization angle error is 2.1/spl deg/ if signal acquirement frequency is 30 times the sound wave frequency.
Starting Page	1884
Ending Page	1887
File Size	620303
Page Count	4
File Format	PDF
ISBN	078038511X
DOI	10.1109/ICSICT.2004.1435204
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-10-18
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Packaging Microphone arrays Frequency Cardiology Commercialization Cameras Automatic control Optical films Microelectronics
Content Type	Text
Resource Type	Article

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