NDLI: Single crystal FBAR with LiNbO3 and LiTaO3 piezoelectric substance layers

Content Provider	IEEE Xplore Digital Library
Author	Osugi, Y. Yoshino, T. Suzuki, K. Hirai, T.
Copyright Year	2007
Description	Author affiliation: NGK Insulators, Ltd., Nagoya (Osugi, Y.; Yoshino, T.; Suzuki, K.)
Abstract	The film bulk acoustic resonator (hereinafter referred to as FBAR) has been proposed for use as a high performance filter. FBAR consists of an acoustic resonator through use of a thin film deposition process. On the other hand, single crystals have been widely utilized as material for resonators due to their material uniformity, low material defect rates, and high material stability. The use of a single crystal to achieve a high frequency resonator will further expand FBAR's application ranges. In this paper, we present single crystal FBAR that is characterized by low loss and high bandwidth. Additionally, this device has the following features: the capability to fabricate a single crystal acoustic resonator through the use of single crystal micro processing technology, such as a single crystal wafer junction, polishing, and etching; and the capability of a wide range of desired filter bandwidths, each able to secure an ample amount of high performance characteristics by varying the single crystal's type and direction. $LiNbO_{3}$ (LN) and $LiTaO_{3}$ (LT), each with the large electromechanical coupling factor $kt^{2},$ are used for the single crystal. 3-inch full-wafer processing is performed, thereby yielding superior uniformity resonators.
Starting Page	873
Ending Page	876
File Size	783199
Page Count	4
File Format	PDF
ISBN	1424406870
ISSN	0149645X
DOI	10.1109/MWSYM.2007.380118
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-06-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Film bulk acoustic resonators Crystalline materials Resonator filters Bandwidth Sputtering Crystals Stability Resonant frequency Acoustic devices Etching piezoelectric resonator filters Bulk acoustic wave device crystals microresonators
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electrical and Electronic Engineering Radiation

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