NDLI: Comparison of Langmuir probe and hairpin methods to characterise microwave cool plasma

Content Provider	IEEE Xplore Digital Library
Author	Amidi, M.
Copyright Year	2008
Description	Author affiliation: Swinburne Univ. of Technol., Hawthorn, VIC (Amidi, M.)
Abstract	As plasma consists of particles, number of these particles refers to plasma density which is the main diagnostic problem, therefore different methods have been developed to measure the plasma density as well as its temperature. Langmuir probe underestimate the density measurements because the accuracy of an I-V curve depends on different factors such as instability in the plasma erosion of the probe tip due to sputtering by the microwave field. To improve the results we used a filtered Langmuir probe. To eliminate the difficulties of Langmuir probe we used hairpin method to determine the plasma density. This technique measures the electron density with a very high accuracy and reproducibility as compared to Langmuir probes. The hairpin probe is a U-shaped resonant structure which works based on measuring the plasma dielectric constant. The results from both methods have been compared in this paper.
Starting Page	1
Ending Page	1
File Size	63147
Page Count	1
File Format	PDF
ISBN	9781424419296
ISSN	07309244
DOI	10.1109/PLASMA.2008.4591017
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-06-15
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microwave measurements Plasmas Masers Probes Microwave FET integrated circuits Density measurement Plasma measurements
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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