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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Spindler, H.L. Gilgenbach, R.M. Sugawara, H. Lash, J.S. Kovaleski, S. Ang, L.K. Lau, Y.Y. |
| Copyright Year | 1996 |
| Description | Author affiliation: Dept. of Nucl. Eng. & Radiol. Sci., Michigan Univ., Ann Arbor, MI, USA (Spindler, H.L.) |
| Abstract | Summary form only given. Mechanisms of KrF laser (248 nm, 1.2 J, 40 ns) ablation have been investigated by electron microscope analysis of targets and thin-films deposited on silicon substrates. Laser ablated (Al and Fe) targets show the formation of conical microstructures, which increase the laser absorption, but also generate larger particulate (5-15 /spl mu/m) on deposited films. The development of these microstructures has been investigated as a function of the number of incident KrF laser pulses (up to 4000). A diagnostic utilizing dye laser scattering from ablated particulate supports the evidence that KrF laser-damaged targets produce more and larger particulate than smooth targets. The time of flight from laser scattering signals gives velocities of 100 m/s for the smaller particulate and 25 m/s for the largest particulate. The effects of substrate heating on thin film deposition are being investigated. A theory of laser absorption by rough surfaces has been derived. |
| Starting Page | 171 |
| Ending Page | 172 |
| File Size | 200739 |
| Page Count | 2 |
| File Format | |
| ISBN | 0780333225 |
| ISSN | 07309244 |
| DOI | 10.1109/PLASMA.1996.550723 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1996-06-03 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Laser ablation Sputtering Pulsed laser deposition Substrates Microstructure Absorption Scattering Laser theory Electron microscopy Semiconductor thin films |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
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