NDLI: Space structure of RF capacitive discharges

Content Provider	IEEE Xplore Digital Library
Author	Yatsenko, N.A.
Copyright Year	1996
Description	Author affiliation: Inst. of Problems in Mech., Acad. of Sci., Moscow, Russia (Yatsenko, N.A.)
Abstract	Summary form only given. The space structure of RF capacitive discharges along the direction of a current is well known. The most important features of it are: 1) RF capacitive discharge has a sheath structure along the direction of the current, including near electrode space charge sheaths and plasma column. 2) The sheaths can have different physical nature, depending on value of U/sub s/-RF voltage upon them. The sheaths cannot be self-sustained at U/sub s/U/sub BR/ (high-current mode). U/sub BR/-RF is the voltage upon the sheaths, at which their breakdown with the help of secondary emission electrons occurs. In this work an interesting and practically not investigated phenomenon, when both of the above mentioned modes of the discharge exist simultaneously in one interelectrode gap, is considered. Besides academic interest, this phenomenon is significant for practical applications, in which uniformity of the discharge along the surface of extended electrodes is important (for example, in gas lasers with transverse RF excitation, in plasma technology, etc.). The experiments were carried out in atomic and molecular gases at pressures from 0.1 up to 300 Torr. The area of electrodes reached the value 10/sup 3/ cm/sup 2/, and the size of an interelectrode gap was up to 10 cm. RF sources of power up to 6 kW on frequencies from 1 to 100 MHz were used.
File Size	136878
File Format	PDF
ISBN	0780333225
ISSN	07309244
DOI	10.1109/PLASMA.1996.550701
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-06-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Radio frequency Electrodes Breakdown voltage Space charge Plasma sheaths Electron emission Surface discharges Surface emitting lasers Gas lasers Laser modes
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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