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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Belenguer, P. Fadlallah, M. Leroy, O. |
| Copyright Year | 1996 |
| Description | Author affiliation: CNRS, Centre de Phys. des Plasmas et Applications, Toulouse, France (Belenguer, P.) |
| Abstract | Summary form only given. A simplified numerical model of radiofrequency discharges in hydrogen has been developed. The model is a one-dimensional, two-electron group, fluid model. The bulk electrons are described by three moments equations: continuity, momentum (drift-diffusion approximation) and energy. The electrons emitted by the electrodes and accelerated in the sheath are described by continuity and energy equations assuming a monoenergetic electron distribution. Only the two first moments are considered for the ions. In the model, only H/sub 2//sup +/ ions have been considered. In spite of this great simplification, the results obtained are quite satisfactory. In hydrogen discharge H/sub 2//sup +/ ions are created by direct electron impact ionization of H/sub 2/ molecules, then these ions are quite efficiently converted into H/sub 3//sup +/ ions. It's generally admitted that the major ions in the discharge (under our conditions) are H/sub 3//sup +/ ions. H/sup +/ and H/sup -/ ions are considered to play a minor role in the electrical characteristic of the discharge. In order to have a simpler model (one ion) it was then necessary to take into account only H/sub 2//sup +/ ions created by electron impact ionization. If we consider that H/sup +/ ions are not too important (erected also by direct electron impact ionization) then, the global ion source term is correctly described in the discharge. We consider two situations: (1) Secondary electron emission regime. (2) Ohmic sheath heating. |
| File Size | 106974 |
| File Format | |
| ISBN | 0780333225 |
| ISSN | 07309244 |
| DOI | 10.1109/PLASMA.1996.550682 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1996-06-03 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Numerical models Hydrogen Radio frequency Electron emission Impact ionization Equations Electrodes Acceleration Electric variables Ion sources |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
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