NDLI: Spherical pinch (soft X-rays/EUV) and vacuum spark (soft/hard X-rays) radiation sources

Content Provider	IEEE Xplore Digital Library
Author	Zhang, L. Bielawski, M. Chen, H. Panarella, E.
Copyright Year	1996
Description	Author affiliation: Adv. Laser & Fusion Technol. Inc., Canada (Zhang, L.)
Abstract	Summary form only given. X-ray microlithography is a well understood technology by now, however, a compact, cost-effective and intense point soft X-ray source is needed to push this technology from research laboratories into production fabs. While conventional rotating-anode X-ray tube has been proven not capable of meeting the throughput requirement (wafers/hour), synchrotron-based soft X-ray microlithography is only economical in large volume production. Among the various schemes of plasma radiation sources, spherical pinch and vacuum spark have been pursued by ALFT (Advanced Laser and Fusion Technology, Inc.) for a number of years as potential candidates for point X-ray sources in future microlithography technology. The spherical pinch is essentially a geometrically modified /spl theta/-pinch. /spl theta/-pinch had been studied in the earlier years of nuclear fusion program as a reactor candidate, but the intrinsic end losses have never been overcome. In the spherical pinch concept the end loss problem has been relieved to a very large extent, and as a result a high temperature plasma can be generated in the center of a spherical vessel with a size smaller than 1 mm. This plasma can emit radiations from visible, UV, extreme UV, and soft X-ray regions of the spectrum. The radiation intensity, source size and spectrum depend on the working gas, the filling pressure, the input electrical energy and other factors. The vacuum spark is a pulsed high current discharge through two properly shaped electrodes in a vacuum. During the discharge "hot spots" (minute high temperature plasmas) are formed in the vicinity of the anode due to the micropinch phenomenon. As a result, intense pulsed X-rays (around the characteristic lines of the electrode materials) can be generated.
File Size	137140
File Format	PDF
ISBN	0780333225
ISSN	07309244
DOI	10.1109/PLASMA.1996.550240
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-06-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Sparks Plasma temperature Plasma sources Plasma x-ray sources Production Fault location Electrodes Laboratories Throughput Power generation economics
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in