NDLI: CAFM detection of resistive tungsten contacts in DRAM devices

Content Provider	IEEE Xplore Digital Library
Author	Ng, E. Lam, D. Zheng, X.
Copyright Year	2008
Description	Author affiliation: Micron Semicond. Asia Pte Ltd., Singapore (Ng, E.; Lam, D.)
Abstract	Resistive contacts in multilayer interconnects have been an ongoing challenge for semiconductor industries. The failing mechanisms behind them were difficult to uncover, which made it necessary to initiate deeper research into each issue that we managed to isolate. The traditional approach of using passive voltage contrast (PVC), scanning electron microscope (SEM), or focused ion beam (FIB) [1] to identify resistance gate contacts is getting more difficult, especially for those contacts with resistance that is only marginally higher than normal contacts. In this paper, we discuss the use of CAFM current scanning mode to detect a failing resistive gate contact as well as a failing resistive substrate contact. Finding the root cause for these resistive contacts is vital to solving reliability and yield losses, and that cannot be achieved unless we first find the resistive contacts with great accuracy. This novel approach to electrical fault isolation using conductive atomic force microscopy (CAFM) will enhance the advanced failure analysis techniques which has so far failed to achieve the accurate detection of resistive tungsten contacts.
Starting Page	1
Ending Page	4
File Size	1253945
Page Count	4
File Format	PDF
ISBN	9781424420391
DOI	10.1109/IPFA.2008.4588172
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-07-07
Publisher Place	Singapore
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Contacts Logic gates Substrates Resistance Transistors Scanning electron microscopy Failure analysis
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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