NDLI: Scale, function and materials: debug and diagnosis in electronic device technology roadmap

Content Provider	IEEE Xplore Digital Library
Author	Boit, C.
Copyright Year	2008
Description	Author affiliation: TUB Berlin Univ. of Technol., Berlin (Boit, C.)
Abstract	Debug and Diagnosis of Integrated Circuits with physical techniques is necessarily correlated strongly to the innovation of electronic device technology. Miniaturization and scaling were main reasons for the introduction of signal access through chip backside in recent years. The introduction of new materials is adding critical challenges, even on the active device level. Based on the technology roadmap to 32 nm and below, this article presents the boundary conditions for functional device analysis and discusses the analysis options. The potential of established techniques is assessed with respect to the mismatch of optical resolution and nanoscale device dimensions, to the resolution gain of scanning probe techniques vs. working distance requirements, to the FIB techniques for circuit edit and ultra thin silicon preparation. Applications of innovative approaches are demonstrated, and critical issues like thermal / mechanical management are discussed.
Starting Page	1
Ending Page	6
File Size	1124166
Page Count	6
File Format	PDF
ISBN	9781424420391
DOI	10.1109/IPFA.2008.4588144
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-07-07
Publisher Place	Singapore
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Integrated optics Integrated circuits Materials Logic gates Technological innovation Integrated circuit interconnections
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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