NDLI: Tool cleanliness characterization for improving productivity and yields

Content Provider	IEEE Xplore Digital Library
Author	Chia, V.K.F.
Copyright Year	2008
Description	Author affiliation: Balazs NanoAnalysis, Singapore (Chia, V.K.F.)
Abstract	Tool cleanliness is a prerequisite for increased production ramp, reduced tool down-time and high process yields. Any materials used in the build of material (BOM) must be verified to be clean both in the bulk of the material and on its surface after machining and cleaning. Bulk analyses are destructive due to the nature of the test and the information required. In contrast, surface analyses should be non-destructive so the part may be re-used after surface cleanliness testing or re-cleaned if the test indicates the part does not pass its cleanliness specification. Wafer tool specifications are in place for particles and metals by the original equipment manufacturers (OEMs). Particle specification depends on the method of wafer clamping and wafer metal specification for tool acceptance is typically in the range of $1-5times10^{10}$ $atoms/cm^{2}.$ No generally accepted organic specifications are in place. Currently, there are no accepted tool parts particle, metal and organic specifications. Very few machine shops, cleaning houses, OEMs and fabs have developed baseline tool parts cleanliness specifications. This paper describes key analytical techniques for bulk and surface characterization of tool parts.
Starting Page	1
Ending Page	3
File Size	315110
Page Count	3
File Format	PDF
ISBN	9781424420391
DOI	10.1109/IPFA.2008.4588205
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-07-07
Publisher Place	Singapore
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface treatment Materials Metals Contamination Surface contamination Cleaning Surface roughness
Content Type	Text
Resource Type	Article

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