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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Naghavi, N. Spiering, S. Powalla, M. Lincot, D. |
| Copyright Year | 2003 |
| Description | Author affiliation: Laboratoire d'Electrochimie et de Chimie Anal., CNRS, Paris, France (Naghavi, N.) |
| Abstract | CIGS based solar cells are presently excellent candidates for a new generation of large scale and low-cost photovoltaic thin film modules. To allow exclusively vacuum processing, a dry alternative for the buffer layer deposition is desirable. For environmental reasons, it is also desirable to get Cd-free devices. Atomic layer chemical vapor deposition (ALCVD or ALD) is a technique ensuring conformal growth of thin films from the vapor phase in a scalable manner. This paper presents optimization studies on the formation of In/sub 2/S/sub 3/ buffer layers by ALD for high efficiency CIGS thin film solar cells. The main parameters investigated are the deposition temperature (between 150 and 260/spl deg/C) and the effect of the thickness of the buffer (15 nm and 30 nm), on growth rates, properties of the films and solar cells parameters. The highest efficiency of 16.4% has been obtained at 220/spl deg/C for a layer thickness of 30 nm. Diffusion of copper and sodium has been evidenced by XPS measurements which may have a positive role in the junction formation processes. The importance of interface chemistry for dry buffer is underlined. |
| Starting Page | 340 |
| Ending Page | 343 |
| File Size | 314271 |
| Page Count | 4 |
| File Format | |
| ISBN | 4990181603 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2003-05-11 |
| Publisher Place | Japan |
| Access Restriction | Subscribed |
| Rights Holder | PVSEC Advisory Committee |
| Subject Keyword | Cadmium compounds Photovoltaic cells Indium Buffer layers Atomic layer deposition Solar power generation Transistors Large-scale systems Photovoltaic systems Chemical vapor deposition |
| Content Type | Text |
| Resource Type | Article |
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