NDLI: Calibration of SIMS measurements of unintentional oxygen concentrations in Al/sub 0.3/Ga/sub 0.7/N/sub y/As/sub (1-y)/ and assessment of the purity of 1,1-dimethylhydrazine

Content Provider	IEEE Xplore Digital Library
Author	Maclean, J.O. Simons, A.J. Houlton, M.R. Martin, T. Birbeck, J.
Copyright Year	2002
Description	Author affiliation: Malvern Technol. Centre, QinetiQ Ltd., Malvern, UK (Maclean, J.O.; Simons, A.J.; Houlton, M.R.; Martin, T.; Birbeck, J.)
Abstract	There is significant commercial interest in 1.3 /spl mu/m dilute nitride-based laser devices. Such devices rely on low concentrations of nonradiative centres in the active region in order to achieve the predicted high performances. Unintentional oxygen contamination in alkyl precursors used in the epitaxy is a source of nonradiative centres. An investigation of the Secondary Ion Mass Spectrometry (SIMS) relative sensitivity factor (RSF) for oxygen in Al/sub 0.3/Ga/sub 0.7/N/sub y/As/sub (1-y)/ was made in order to calibrate and compare background oxygen impurities in 3 different precursor batches of dimethylhydrazine (DMHy). A DMHy batch was identified which gave background oxygen concentrations in Al-containing layers below the SIMS detection limit (2-8E16 cm/sup -3/) with 0.2% nitrogen content. Therefore, providing that suitable growth conditions are chosen such that nonradiative centres other than oxygen do not form, this DMHy precursor batch is expected to give In/sub x/Ga/sub (1-x)/N/sub 0.002/As/sub 0.998/ quantum wells with good luminescence properties.
Sponsorship	IEEE Electron Devices Soc. IEEE Lasers & Electro-Opt. Soc
Starting Page	261
Ending Page	263
File Size	291191
Page Count	3
File Format	PDF
ISBN	0780373200
ISSN	10928669
DOI	10.1109/ICIPRM.2002.1014355
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-05-12
Publisher Place	Sweden
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Calibration Oxygen Vertical cavity surface emitting lasers Pollution measurement Surface emitting lasers Epitaxial growth Nitrogen Contamination Chemical lasers Gallium arsenide
Content Type	Text
Resource Type	Article

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