NDLI: Fabrication of a PMMA Torsional Micromirror Device Based on Hot Embossing Process

Content Provider	IEEE Xplore Digital Library
Author	Amaya, S. Dao, D.V. Sugiyama, S.
Copyright Year	2008
Description	Author affiliation: TOWA Corp., Kyoto (Amaya, S.) \|\| Ritsumeikan Univ., Kusatsu (Dao, D.V.; Sugiyama, S.)
Abstract	This paper reports the fabrication of a PMMA torsional micromirror device using hot embossing and ultra-precision machining. The mirror is operated based on electrostatic vertical comb-drive actuators. The fabrication process is described as followings. First, two-stepped silicon mold is fabricated from silicon wafer by photolithography and ICP-RIE. Next, the micromirror device structures are formed on PMMA by hot embossing method. The comb-drive actuator has finger width and gap between fingers are both 5 um, and device thickness is about 60 um. The PMMA layer that remained after hot embossing is removed by ultra-precision cutting method to release the movable parts. The maximum surface roughness of the mirror after released by ultra-precision cutting is 87 nm (Rz). Finally, the device is coated with a gold layer to create the electrical conductivity for comb finger of the actuator. PMMA torsional micromirror comb-drive actuator has been fabricated, and the device was tested successfully.
Starting Page	7
Ending Page	11
File Size	4561552
Page Count	5
File Format	PDF
ISBN	9781424429189
DOI	10.1109/MHS.2008.4752413
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-11-06
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Micromirrors Embossing Fingers Mirrors Silicon Machining Electrostatic actuators Lithography Rough surfaces
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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