NDLI: Development of bi-axial tensile tester to investigate yield locus for aluminum film under multi-axial stresses

Content Provider	IEEE Xplore Digital Library
Author	Nagai, Y. Namazu, T. Araki, N. Tomizawa, Y. Inoue, S.
Copyright Year	2008
Description	Author affiliation: Univ. of Hyogo, Himeji (Nagai, Y.; Namazu, T.; Araki, N.)
Abstract	This paper describes novel biaxial tensile test technique for a film specimen to investigate material responses to uniaxial and biaxial tensile forces. We have developed biaxial tensile tester that consists of four sets of actuator, load cell, and displacement meter in order to apply an arbitrary amount of tensile force to a film specimen in each axis. With the uniaxial test specimen of sputtered Al film, average Young's modulus of 35 GPa and yield strength of 115 MPa have been obtained. With the biaxial test specimen, evaluation of the yield locus for Al film has carried out by applying biaxial stresses with various strain rate ratios. The obtained yield stresses could be fitted by the yield criterion based on Logan-Hosford equation. This indicates that the flow stress under biaxial stress condition differ from that under uniaxial condition. Information about the yield locus would be useful for the structural design of MEMS including Al film structures subjected to biaxial stresses.
Starting Page	443
Ending Page	446
File Size	707516
Page Count	4
File Format	PDF
ISBN	9781424417926
ISSN	10846999
DOI	10.1109/MEMSYS.2008.4443688
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-01-13
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Tensile stress Aluminum Springs Semiconductor films Materials testing Micromechanical devices Chromium System testing Sputtering Actuators
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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