NDLI: A perforated plate stacked Si/glass heat exchanger with in-situ temperature sensing for joule-thomson coolers

Content Provider	IEEE Xplore Digital Library
Author	Weibin Zhu White, M.J. Nellis, G.F. Klein, S.A. Gianchandani, Y.B.
Copyright Year	2008
Description	Author affiliation: Univ. of Michigan, Ann Arbor (Weibin Zhu)
Abstract	This paper reports a micromachined recuperative heat exchanger integrated with in-situ temperature sensors. In this design, numerous high-conductivity silicon plates, integrated with platinum resistance temperature detectors (Pt RTDs) are fabricated and stacked alternating with low- conductivity Pyrex spacers. The device is intended for use with Joule-Thomson (J-T) coolers. The fabricated versions of the device have a footprint of 1 x 1 $cm^{2},$ and lengths of up to 2 cm. Tests at cryogenic temperatures (120-210 K) show that the effectiveness of the heat exchanger is as high as 0.785. In a preliminary J-T self-cooling test, the temperature at the expansion orifice dropped 13 K from the inlet temperature for an inlet pressure of 527 kPa (76 psia). The integrated Pt RTDs presented a sensitivity of 0.26%/K in the linear operational range of 150-300 K, but remained usable at temperatures below that range. Details regarding evaluation apparatus are discussed.
Starting Page	844
Ending Page	847
File Size	1632773
Page Count	4
File Format	PDF
ISBN	9781424417926
ISSN	10846999
DOI	10.1109/MEMSYS.2008.4443788
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-01-13
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Glass Temperature sensors Silicon Platinum Detectors Conductivity Cryogenics Automatic testing Orifices Temperature distribution
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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