NDLI: A novel optical lamellar grating out-of-plane microgyroscope

Content Provider	IEEE Xplore Digital Library
Author	Guangya Zhou Cheo, K.K.L. Yu Du Siong Fook Chau
Copyright Year	2008
Description	Author affiliation: Nat. Univ. of Singapore, Singapore (Guangya Zhou; Cheo, K.K.L.; Yu Du; Siong Fook Chau)
Abstract	This paper demonstrates the realization of a novel lamellar grating out-of-plane gyroscope design. The sensing mechanism is based on out-of-plane motion of movable light-reflecting beams changing the phase relationship between the light reflected off the two sets of beams. This phase relationship is manifested as an intensity change in the zeroth-order diffracted light. The device consists of two in-plane 180deg out-of-phase vibrating masses with a set of overlapping light-reflecting beams behaving essentially as a lamellar grating. The device was fabricated based on the SOI-MUMPS process. The gyroscope demonstrated a sensitivity of 17.8 muV/(deg/s) and linearity error of less than 0.6%. The results have great potential to be improved through the use of more stable lasers, vacuum operation and better fabrication control.
Starting Page	864
Ending Page	867
File Size	666419
Page Count	4
File Format	PDF
ISBN	9781424417926
ISSN	10846999
DOI	10.1109/MEMSYS.2008.4443793
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-01-13
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Gratings Optical sensors Laser beams Gyroscopes Biomedical optical imaging Optical interferometry Optical diffraction Optical detectors Optical modulation Frequency
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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