NDLI: Carbon nanotube arrays on flexible substrate and their field emission characteristics

Content Provider	IEEE Xplore Digital Library
Author	Ting-Hsien Chen Sheng-Yi Lu Chia-Min Lin Wen-Kuang Hsu Weileun Fang
Copyright Year	2008
Description	Author affiliation: Inst. of NanoEngineering & MicroSystems, Hsinchu (Ting-Hsien Chen)
Abstract	This study presents a novel process to batch-fabricated carbon nanotube devices on flexible substrate. In short, the pre-made carbon nanotube (CNT) arrays on Si-wafer are firstly blended with polymer and are then transferred onto a polymer film using chemical-vapor-deposition (CVD) of parylene. This yields CNT arrays on flexible substrates. Electrical measurements reveal that nanotube arrays behave as ohmic conductors and their current-voltage profile is linear. Nanotubes embedded in polymer are then exposed by $O_{2}$ plasma etching and field emission measurements indicate that exposed nanotube arrays exhibit a low threshold field emission at 0.58 V/mum and field enhancement factor appears to be 5500. Thus, the present devices offer a novel route to flexible FED applcation.
Starting Page	697
Ending Page	700
File Size	2565460
Page Count	4
File Format	PDF
ISBN	9781424417926
ISSN	10846999
DOI	10.1109/MEMSYS.2008.4443752
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-01-13
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Carbon nanotubes Substrates Plasma measurements Polymer films Chemical vapor deposition Current measurement Electric variables measurement Conductors Plasma applications Plasma chemistry
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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