NDLI: Fabrication and evaluation of V-shaped MOS transistor probe

Content Provider	IEEE Xplore Digital Library
Author	Lee, S.H. Geunbae Lim Hyunjung Shin Wonkyu Moon
Copyright Year	2008
Description	Author affiliation: Pohang Univ. of Sci. & Technol., Pohang (Lee, S.H.; Geunbae Lim)
Abstract	The V-shaped metal-oxide-semiconductor (MOS) transistor probe is fabricated and evaluated to detect the surface electric properties. The V-shaped structure is selected for the better lateral stiffness compared with the simple rectangular structure and the specific dimensions are determined using the parallel beam approximation (PBA). The conductive nano tip is grown with the focused-ion-beam (FIB) system, which delivers the electric properties from the sample surface to the MOS transistor. Since the MOS transistor has the high working frequency and the high sensitivity, the device can detect the small electric properties with the high speed. The fabricated device is applied to the various test patterns like the metal lines and PZT poling regions. The results represent the well defined measurement patterns and show the promising aspect of the surface electric property detection with high sensitivity and high working frequency.
Starting Page	351
Ending Page	354
File Size	575243
Page Count	4
File Format	PDF
ISBN	9781424417926
ISSN	10846999
DOI	10.1109/MEMSYS.2008.4443665
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-01-13
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication MOSFETs Probes Frequency Equations Electric variables measurement Electrostatic measurements Force measurement Ferroelectric materials Springs
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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