NDLI: Miniaturization of on-wall in-tube flexible thermal flow sensor using heat shrinkable tube

Content Provider	IEEE Xplore Digital Library
Author	Naito, J. Shikida, M. Hirota, M. Tan, Z.Y. Sato, K.
Copyright Year	2008
Description	Author affiliation: Nagoya Univ., Nagoya (Naito, J.; Shikida, M.; Hirota, M.; Tan, Z.Y.; Sato, K.)
Abstract	We previously proposed a novel type of on-wall in-tube thermal flow sensor, and experimentally evaluated its performance. The sensor has an advantage that it can measure the flow-rate both at near the tube entrance (hydraulically developing region) [1] and at bent tube (axially asymmetric flow) [2]. With the requirements of further miniaturization of the sensor in the fields of the portable fuel cells and chemical analyzers, we newly developed the fabrication process to miniaturize it less than 2.0 mm in external diameter by using a heat shrinkable tube. The film sensor fabricated by photolithography was inserted inside tube manually. By applying heat shrinking process, the film was automatically mounted on the inner wall surface, and the outer size of the tube was miniaturized to almost of the half size from its original. The final inner and outer diameters of the tube were 1.2 mm and 1.7 mm, respectively. We evaluated the fundamental performance of this flow sensor. The electrical resistance at the sensor linearly increased with temperature. The obtained temperature coefficient of resistance of the sensing element was 0.0023 $K^{-1}.$ We measured the relationship between the input power consumption and the gas flow rate, and finally evaluated the response time. We obtained a value of 100 msec by forming a cavity structure under the heat element.
Starting Page	924
Ending Page	927
File Size	1469756
Page Count	4
File Format	PDF
ISBN	9781424417926
ISSN	10846999
DOI	10.1109/MEMSYS.2008.4443808
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-01-13
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Thermal sensors Chemical sensors Temperature sensors Fluid flow measurement Chemical analysis Electric resistance Fuel cells Chemical processes Fabrication Lithography
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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