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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Okumoto, T. Yamasawa, K. Liu, X. Morisako, A. Matsumoto, M. |
| Copyright Year | 2005 |
| Description | Author affiliation: Fac. of Eng., Shinshu Univ., Nagano, Japan (Okumoto, T.; Yamasawa, K.; Liu, X.; Morisako, A.; Matsumoto, M.) |
| Abstract | In this experiment, the detailed W underlayer preparation condition and its influence on the properties of NdFeB films have been studied. Crystallized NdFeB film was deposited onto a glass substrate with W underlayer at 450/spl deg/C. The magnetic properties of the films sensitively depended on the substrate temperature of the underlayer. The thickness of the film was 15 nm. The film were characterized by X-ray diffractometry (XRD), vibrating sample magnetometer (VSM) and scanning electron microscopy (SEM). The results concluded that the improvement of the underlayer crystallinity is crucial for fabrication of NdFeB films with perpendicular magnetic anisotropy. |
| Sponsorship | Magnetics Soc. of Japan Magnetics Soc. of the IEEE |
| Starting Page | 593 |
| Ending Page | 594 |
| File Size | 212695 |
| Page Count | 2 |
| File Format | |
| ISBN | 0780390091 |
| DOI | 10.1109/INTMAG.2005.1463725 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2005-04-04 |
| Publisher Place | Japan |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Transistors Magnetic films Crystallization Substrates Scanning electron microscopy Glass Magnetic properties Temperature dependence Temperature sensors X-ray diffraction |
| Content Type | Text |
| Resource Type | Article |
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