NDLI: Precise fabrication of coupled ring-resonator structures

Content Provider	IEEE Xplore Digital Library
Author	Samarelli, A. De La Rue, R.M. Sorel, M. Canciamilla, A. Morichetti, F. Melloni, A.
Copyright Year	2009
Description	Author affiliation: Department of Electronics and Electrical Engineering, University of Glasgow, Rankine Building, Oakfield Avenue, G12 8LT, Scotland (Samarelli, A.; De La Rue, R.M.; Sorel, M.) \|\| Dipartimento di Elettronica e Informazione, Politecnico di Milano, via Ponzio 34/5, 20133, Italy (Canciamilla, A.; Melloni, A.) \|\| POLICOM, via Colombo 81, 20133 Milano, Italy (Morichetti, F.)
Abstract	We report improvements in fabrication precision obtained in coupled ring-resonator slow-wave structures on an SOI platform. Optical delay lines were formed by using a cascade of coupled resonant cavities [1] to slow the propagation of light through the combined effects of resonance and increased optical path length. Mismatch between the resonance frequencies of individual rings has the additional effect of broadening the spectrum - and such mismatch can compromise the correct operation of the fabricated device structures; in particular sub-nanometer precision is required in order to obtain the desired working behaviour. An optimized HSQ electron-beam-resist based fabrication technology makes it possible to achieve low propagation losses (∼1 dB/cm) [2] and a precision of better than 0.5 nm for 500×220 $nm^{2}$ waveguide dimensions. We have shown that so small a variation in the waveguide width can consistently be achieved when the HSQ resist is diluted immediately prior to use, Fig.1(b), - but that much less reproducible results are obtained if a single dilution is prepared and used for an extended period, Fig. 1(a). Single-ring resonator, bus-coupled ring resonator all-pass filters (up to 64 rings) [3] and directly coupled ring resonators (up to 20 rings in a CROW configuration) in apodised structures have been fabricated, in order to assess the variability of the process.
Starting Page	1
Ending Page	1
File Size	1463837
Page Count	1
File Format	PDF
ISBN	9781424440795
DOI	10.1109/CLEOE-EQEC.2009.5192033
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-14
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical filters Optical device fabrication Optical propagation Resonator filters Resonant frequency Optical resonators Delay lines Resonance Optical coupling Optical ring resonators
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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