NDLI: Significance of coating stress on substrate bow in large area processing of MCM

Content Provider	IEEE Xplore Digital Library
Author	Kwanho Yang Jang-Hi Im Heistand, R.H.
Copyright Year	1997
Description	Author affiliation: Dow Chem. Co., Midland, MI, USA (Kwanho Yang)
Abstract	The substrate bow in a large area processing (LAP) was simulated using a finite element analysis (FEA). The structures considered were aluminum (Al) and glass substrates of various thicknesses, and a coating from photosensitive film thickness. It was found that the deflection of a large area substrate, e.g. 400 mm square, could not always be obtained from the linear, small deflection theory even if the curvature might be small and the stress-strain behavior in the linear elastic regime. In this case, the nonlinear, large deflection theory had to be adopted. Also, the gravity effect on the weight of substrate turned out to be very significant and had to be incorporated as well. The simulation incorporating these two factors agreed well with the experimental data, which was generated by spin coating and curing the BCB formulation on Al substrates, 400/spl times/400/spl times/1.27 mm. As a means of flattening out the curvature, subjecting a vacuum underneath the substrate was simulated. Significant reduction of the substrate deflection was observed by applying only a very small vacuum. This result suggested that the use of double-stick tape on the bottom of the substrate, for example, might also be feasible to completely eliminate the bow.
Starting Page	192
Ending Page	195
File Size	459676
Page Count	4
File Format	PDF
ISBN	0780339290
ISSN	10898190
DOI	10.1109/IEMT.1997.626902
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-10-13
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Coatings Substrates Residual stresses Temperature Glass Shape Closed-form solution Mechanical factors Curing Gravity
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Electrical and Electronic Engineering

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