NDLI: MEMS mechanical logic units: design and fabrication with micragem and polymumps

Content Provider	IEEE Xplore Digital Library
Author	Sae-Won Lee Johnstone, R. Parameswaran, A.M.
Copyright Year	2005
Description	Author affiliation: Sch. of Eng. Sci., Simon Fraser Univ., Burnaby, BC (Sae-Won Lee; Johnstone, R.; Parameswaran, A.M.)
Abstract	We are currently developing basic building blocks for creating digital logic units that are based on mechanical components, which could be used instead of transistors. Transistors, which are based on semiconductors, rely on precisely controlling the conductivity of their constituent materials. However, at low or high temperatures, that control is lost as semiconductors revert to intrinsic behaviour. Also, semiconductors exhibit various complications under ionizing irradiation. We are looking into creating logic units that use electrical signals, but mechanical relays, with technology provided by MEMS. The logic units consist of a mechanical relay with three electrical gates. The mechanical relay is fabricated with metal over insulator and is operated by applying voltage to the gate, which creates an electric force between the gate and a cantilever. The established electric force arches the cantilever, which is shorted to the source, to make a contact with the drain. Since the operation is based on interactions between metal gates, the proposed method does not suffer from the limitations shared by semiconductors. With different input combinations applied to the gates of the device, development of MEMS mechanical logic units is possible, including all of the standard digital gates
Starting Page	1513
Ending Page	1516
File Size	203793
Page Count	4
File Format	PDF
ISBN	0780388852
ISSN	08407789
DOI	10.1109/CCECE.2005.1557267
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-05-01
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Logic design Fabrication Relays Conductivity Conducting materials Semiconductor materials Temperature control Metal-insulator structures Dielectrics and electrical insulation
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering Hardware and Architecture

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