NDLI: Exploiting additional actuators and sensors for nano-positioning robust motion control

Content Provider	IEEE Xplore Digital Library
Author	van Herpen, R. Oomen, T. Kikken, E. van de Wal, M. Aangenent, W. Steinbuch, M.
Copyright Year	2014
Description	Author affiliation: Dept. of Mech. Eng., Eindhoven Univ. of Technol., Eindhoven, Netherlands (van Herpen, R.; Oomen, T.; Kikken, E.; Steinbuch, M.) \|\| ASML Res., Veldhoven, Netherlands (van de Wal, M.; Aangenent, W.)
Abstract	The ongoing need for miniaturization and an increase of throughput in IC-manufacturing is obstructed by performance limitations in motion control of nano-positioning wafer stages. These limitations are imposed by flexible dynamical behavior, associated with structural deformations of the nano-positioning stages. The aim of this research is to investigate limits on achievable performance in a conventional control configuration and to mitigate these limits through the use of additional actuators and sensors. To this end, a systematic framework for control design using additional actuators and sensors in the generalized plant configuration is presented, which leads to a well-posed $ℋ_{∞}-control$ optimization problem that extends conventional design approaches in a natural way and exploits physical insight to address structural deformations in weighting filter design. Through an experimental confrontation of the design framework with a prototype next-generation nano-positioning motion system, successful performance enhancement beyond the conventional limits is demonstrated.
Starting Page	984
Ending Page	990
File Size	1605565
Page Count	7
File Format	PDF
ISBN	9781479932726
ISSN	07431619
e-ISBN	9781479932740
DOI	10.1109/ACC.2014.6858927
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-06-04
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	American Automatic Control Council(AACC)
Subject Keyword	Sensors Actuators Bandwidth Control design Robust control Robustness Standards Identification Mechatronics
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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