NDLI: Design and control of 6-DOF high-precision scan stage with gravity canceller

Content Provider	IEEE Xplore Digital Library
Author	Ohnishi, W. Fujimoto, H. Sakata, K. Suzuki, K. Saiki, K.
Copyright Year	2014
Description	Author affiliation: Univ. of Tokyo, Kashiwa, Japan (Ohnishi, W.; Fujimoto, H.) \|\| Nikon Corp., Yokohama, Japan (Sakata, K.; Suzuki, K.; Saiki, K.)
Abstract	High-precision scan stages are used for fabrication of integrated circuits, liquid crystal displays and so on. To fabricate such precise devices, not only stages position but also stages attitude needs to be controlled rapidly and precisely. In this paper, an experimental 6-degree-of-freedom (6-DOF) high-precision stage with a novel 6-DOF air bearing called “gravity canceller” is designed and fabricated. The 6-DOF stage consists of a fine stage and a coarse stage. The gravity canceller compensates for the fine stage's gravity and supports the fine stage without friction. This structure enables us to reduce heat which is generated close to the fine stage. For a 6-DOF control problem, attitude control is as important as translational control. Rotational motion, however, has nonlinearity and coupling arising from dynamics and kinematics which could degrade the attitude control performance. Therefore, in our past paper, our research group proposed a multi-input multi-output nonlinear feedforward attitude controller to compensate such problems. Experiments were performed to verify the effectiveness of the attitude controller by using the new experimental 6-DOF stage.
Starting Page	997
Ending Page	1002
File Size	1304768
Page Count	6
File Format	PDF
ISBN	9781479932726
ISSN	07431619
e-ISBN	9781479932740
DOI	10.1109/ACC.2014.6859023
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-06-04
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	American Automatic Control Council(AACC)
Subject Keyword	Gravity Attitude control Feedforward neural networks Equations Couplings Kinematics Sensors Manufacturing systems Nonlinear systems Nano systems
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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