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Content Provider | IEEE Xplore Digital Library |
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Author | Shien-Wen Wang Sun, A.C. Fu-Te Yuan Jen-Hwa Hsu Po-Cheng Kuo |
Copyright Year | 1965 |
Abstract | Samples with glass/CrRu(90 nm)/Pt(2 nm)/FePt(20 nm) film structure were sequentially planetary-sputtered at an in situ heating temperature of 350degC to investigate the effect of sputtering rate on the ordering of L10-FePt (001) films. The degree of chemical ordering was enhanced by lowering the sputtering rate of the FePt layer. The slow sputtering process also promoted the formation of the (001) preferred orientation by improving epitaxial growth, because the thickness of the Fe and Pt layers in each revolution become smaller as the sputtering rate was reduced. Therefore, the diffusion lengths of the Fe and Pt atoms required for migration into the L10 lattice sites became shorter. The sputter parameters can be optimized to form ordered FePt (001) films with a high magnetic squareness ratio ( 0.8) and large coercivity at 300degC, which is 50degC lower than in previous reports. The results herein provide useful information on the fabrication of FePt films with perpendicular anisotropy at low temperatures in media use. |
Sponsorship | IEEE Magnetics Society |
Starting Page | 3580 |
Ending Page | 3583 |
Page Count | 4 |
File Size | 502890 |
File Format | |
ISSN | 00189464 |
Volume Number | 45 |
Issue Number | 10 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2009-10-01 |
Publisher Place | U.S.A. |
Access Restriction | One Nation One Subscription (ONOS) |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Sputtering Temperature Iron Magnetic films Glass Heating Chemicals Epitaxial growth Atomic layer deposition Lattices perpendicular anisotropy Diffusion length FePt ordering |
Content Type | Text |
Resource Type | Article |
Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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