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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Seok Bae Yang-Ki Hong Jae-Jin Lee Jalli, J. Abo, G.S. Lyle, A. Choi, B.C. Donohoe, G.W. |
| Copyright Year | 1965 |
| Abstract | We fabricated 3 times 3 array of 1 mum thick Ni-Zn-Cu ferrite and air-core planar inductors (5 times 5 mm2 in size; 2.5, 3.5, and 4.5 turns of Cu coil) on 4 inch bare Si wafer and 300 nm thick SiO2/Si wafer, respectively. The ferrite inductor showed higher Q than that of air-core inductor in the range of 7 to 100 MHz. The Q (= 19.5) of 4.5 turn ferrite inductor is 3.3 times higher than that (= 5.9) of 4.5 turn air-core inductor at 10 MHz, and inductance (L) increased by 10%. The Q-factors were found to be about 50 at 2.3 MHz and 20 at 10 MHz, respectively, for the ferrite inductor. |
| Sponsorship | IEEE Magnetics Society |
| Starting Page | 4773 |
| Ending Page | 4776 |
| Page Count | 4 |
| File Size | 1211188 |
| File Format | |
| ISSN | 00189464 |
| Volume Number | 45 |
| Issue Number | 10 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-10-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Ferrites Multichip modules Coils Thin film inductors Magnetic anisotropy Magnetic resonance Perpendicular magnetic anisotropy Inductance Magnetic films Parasitic capacitance on-chip power module DC-DC converter integrated inductor Ni-Zn-Cu ferrite |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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