NDLI: Preparation of YBaCuO thin films with excellent crystallinity on amorphous substrates prepared by facing targets sputtering

Content Provider	IEEE Xplore Digital Library
Author	Nakagawa, S. Takeuchi, T. Naoe, M.
Copyright Year	1965
Abstract	YBa/sub 2/Cu/sub 3/O/sub x/ (YBCO) thin films with almost perfect orientation were prepared on amorphous fused quartz substrates by a facing targets sputtering (FTS) system without a detectable difference in composition between targets and films. The lowest substrate temperatures at which clear c-axis orientation and evident crystallite growth were attained were 490 degrees C and 580 degrees C. However, the films deposited on MgO exhibited a modulation structure with spacing of 4.2 A in thickness direction normal to the film plane, whereas the films deposited on fused quartz did not exhibit such a modulation structure. The film deposited on fused quartz at substrate temperatures as low as 600 degrees C had a T/sub c/ as high as 94 K with perfect c-axis orientation and excellent surface smoothness. Consequently, the FTS system may be suitable for fabricating such superconductive oxide films, even on amorphous substrates.<>
Sponsorship	IEEE Magnetics Society
Starting Page	1430
Ending Page	1432
Page Count	3
File Size	266114
File Format	PDF
ISSN	00189464
Volume Number	26
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1990-09-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Yttrium barium copper oxide Transistors Crystallization Amorphous materials Substrates Sputtering Superconducting films Superconductivity Superconducting thin films Magnetic films
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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