NDLI: Three-Mask Polysilicon Thin-Film Transistor Biosensor

Content Provider	IEEE Xplore Digital Library
Author	Kai Sun Zeimpekis, I. Lombardini, M. Ditshego, N.M.J. Pearce, S.J. Kiang, K.S. Thomas, O. de Planque, M.R.R. Chong, H.M.H. Morgan, H. Ashburn, P.
Copyright Year	1963
Abstract	Biosensors are commonly produced using a siliconon-insulator (SOI) CMOS process and advanced lithography to define nanowires. In this paper, a simpler and cheaper junctionless three-mask process is investigated, which uses thin-film technology to avoid the use of SOI wafers, in situ doping to avoid the need for ion implantation and direct contact to a low-doped polysilicon film to eliminate the requirement for heavily doped source/drain contacts. Furthermore, TiN is used to contact the biosensor source/drain because it is a hard resilient material that allows the biosensor chip to be directly connected to a printed circuit board without wire bonding. pH sensing experiments, combined with device modeling, are used to investigate the effects of contact and series resistance on the biosensor performance, as this is a key issue when contacting directly to low-doped silicon. It is shown that in situ phosphorus doping concentrations in the range 4 × 10¹⁷-3 × 10¹⁹ cm^-3 can be achieved using 0.1% PH₃ flows between 4 and 20 sccm. Furthermore, TiN makes an ohmic contact to the polysilicon even at the bottom end of this doping range. Operation as a biosensor is demonstrated by the detection of C-reactive protein, an inflammatory biomarker for respiratory disease.
Sponsorship	IEEE Electron Devices Society
Starting Page	2170
Ending Page	2176
Page Count	7
File Size	1274220
File Format	PDF
ISSN	00189383
Volume Number	61
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Biosensors Thin film transistors Immune system Doping Nanowires Tin Semiconductor process modeling thin-film transistors (TFTs). Biosensor pH sensor plasma chemical vapor deposition semiconductor device fabrication thin-film transistors (TFTs)
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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