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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Perry, R.J. Uyemura, J.P. |
| Copyright Year | 1963 |
| Abstract | An iterative approximation based on the charge-sheet model which calculates the charge-storage capacity of a metal-oxide-semiconductor (MOS) capacitor is presented. The iterative approximation combines the numerical accuracy available from two-dimensional semiconductor device simulations with the computational efficiency normally associated with closed-form solutions. In addition, under certain process and bias conditions, the iterative solution predicts behavior not demonstrated by the closed-form equations, but verified by results obtained from device simulations. The approximation is therefore useful in the design of MOS-based circuits when quick but accurate estimations of charge-storage capacity are required. The iterative approximation is applied to estimate the charge-storage capacity of a variety of dynamic random-access memory (DRAM) trench capacitor cells. Several examples comparing charge-storage capacity approximations obtained from numerical semiconductor device simulations, closed-form solutions, and the proposed iterative approximation are given for inversion-store (IST), diffusion-store (DST), substrate-plate (SPT), and stacked (ST) trench-type DRAM cells. As expected, the iterative solution consistently produces results that compared favorable to the results obtained from numerical device simulations but at a much lower computational cost. |
| Sponsorship | IEEE Electron Devices Society |
| Starting Page | 2217 |
| Ending Page | 2225 |
| Page Count | 9 |
| File Size | 873339 |
| File Format | |
| ISSN | 00189383 |
| Volume Number | 42 |
| Issue Number | 12 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1995-12-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Computational modeling Circuit simulation Semiconductor devices Computational efficiency Closed-form solution Random access memory Numerical simulation MOS capacitors Equations Predictive models |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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