NDLI: Formation of Magnetic Nanoparticles by Annealing Continuous CoFeB/Cu Bilayer Thin Films

Content Provider	IEEE Xplore Digital Library
Author	Ting Xie Gomez, R.D.
Copyright Year	1965
Abstract	This paper reports a novel yet simple maskless method for fabricating monodisperse submicrometer magnetic islands by annealing continuous CoFeB/Cu bilayer films. Annealing drives the diffusion of Co and Fe into the Cu underlayer, causing them to aggregate into submicrometer islands at the Cu grain boundaries. This was established by in situ Auger electron spectroscopy (AES), along with scanning electron microscopy and high-resolution atomic and magnetic force microscopy, to determine the surface composition at various stages of preparation. The composition of the magnetic clusters was established by energy dispersive X-ray spectroscopy. Our results indicate that Co and Fe are coalesced, with their relative ratio remaining similar to the starting composition of the sputtering target, while boron is dissociated from the magnetic species. Also, the areal density of the islands was found to be strongly dependent on the Cu thickness and annealing temperature, while the size of magnetic particles was only weakly dependent. This feature was utilized to control the distribution of monosized magnetic islands.
Sponsorship	IEEE Magnetics Society
Starting Page	1
Ending Page	4
Page Count	4
File Size	1570233
File Format	PDF
ISSN	00189464
Volume Number	51
Issue Number	11
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Annealing Iron Magnetic resonance imaging Surface morphology Amorphous magnetic materials Films Grain boundaries grain boundary diffusion Nanoparticle mask-less fabrication AFM MFM nanoparticle Atomic force microscopy (AFM) magnetic force microscopy (MFM) maskless fabrication
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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