NDLI: Influence of Cu Underlayer on the High-Frequency Magnetic Properties of FeCoSiO Thin Films

Content Provider	IEEE Xplore Digital Library
Author	Lu, G.D. Miao, X.S. Cheng, W.M. Huang, X.F. Yang, L. Pan, L.Q.
Copyright Year	1965
Abstract	A series of soft magnetic FeCoSiO films was fabricated on Si (100) substrates using Cu as the underlayer by radio frequency magnetron sputtering. The influence of Cu underlayers on the dynamic magnetic properties of FeCoSiO thin films was studied in detail. The results show that the Cu underlayers have a significant influence on the high-frequency properties and the damping factor of as-sputtered FeCoSiO films, while the static magnetic properties of sputtered films do not demonstrate obvious improvement. In the absence of Cu underlayers, the optimal films with the desired properties of low coercivity, H_c ~ 2.5 Oe; high saturation magnetization, 4πMs ~ 11.6 kGs; and high natural ferromagnetic resonant frequency, f_r ~ 4.05 GHz, were obtained. With the increase of the underlayer's thickness, the complex permeability of FeCoSiO films has a significant change. The damping factor, which can be determined by curve fitting, based on the theoretical equation changed from 0.04 to 0.19 and reaches its maximum value when the Cu thickness is 2 nm. The increasing extent of damping factor is much larger than that in the previous reports. The reason is suggested to be related to change the film's stress, surface, and interface roughness by the underlayer. It shows that using a Cu underlayer is an effective way for tuning the high-frequency properties and damping factor of soft magnetic thin films. It also implies that the effect of underlayer must be considered when the magnetic films are used in the gigahertz band.
Sponsorship	IEEE Magnetics Society
Starting Page	1
Ending Page	4
Page Count	4
File Size	1325503
File Format	PDF
ISSN	00189464
Volume Number	51
Issue Number	11
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Magnetic properties Magnetic films Permeability Soft magnetic materials Damping Magnetomechanical effects magnetic properties Cu underlayer FeCoSiO magnetic films high-frequency
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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