NDLI: Micro-Electrostatic Vibration-to-Electricity Converters

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Roundy, Shad Paul, K. Wright Kristofer, S. J. Pister
Copyright Year	2002
Abstract	Advances in low power VLSI design, along with the potentially low duty cycle of wireless sensor nodes open up the possibility of powering small wireless computing devices from scavenged ambient power. Low level vibrations occurring in typical household, office, and manufacturing environments are considered as a possible power source for wireless sensor nodes. This work focuses on the design of electrostatic vibration-to-electricity converters using MEMS fabrications technology. Detailed models of three different design concepts are developed. The three design concepts are evaluated and compared based on simulations and practical considerations. A formal optimization of the preferred design concept is performed, and a final design is produced using the optimal design parameters. Simulations of the optimized design show that an output power density of 116 μW/cm3 is possible from input vibrations of 2.25 m/s2 at 120 Hz. Test devices have been designed for a Deep Reactive Ion Etching (DRIE) process that etches MEMS structures into the top layer of a Silicon On Insulator (SOI) wafer. The devices are currently being fabricated.
Sponsorship	Microelectromechanical Systems
Starting Page	487
Ending Page	496
Page Count	10
File Format	PDF
ISBN	0791836428
DOI	10.1115/IMECE2002-39309
Volume Number	Microelectromechanical Systems
Conference Proceedings	ASME 2002 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2002-11-17
Publisher Place	New Orleans, Louisiana, USA
Access Restriction	Subscribed
Subject Keyword	Energy scavenging Vibration to electricity conversion Vibration
Content Type	Text
Resource Type	Article

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