NDLI: A New Surface Modification Method to Alleviate Stiction of Microstructures

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Lee, Cheng-Chang Hsu, Wensyang
Copyright Year	2002
Abstract	Modification on surface roughness has been shown effectively to alleviate both release and in-use stiction in the previous literatures. However, the modified materials in the previously reported methods were limited to polysilicon or single crystalline silicon with special properties. Here, the proposed modification method not only can apply to silicon without extra property requirements, but also has potential to modify other materials, such as oxide, nitride, and some metals. The process combined spin-on photoresist and reactive ion etching (RIE). The proposed low temperature process is simple, and no extra mask is needed. Consequently, there is more flexibility to add the roughness modification to the original fabrication process of micro devices. In this study, polysilicon and silicon nitride are demonstrated as the modified materials. Then the anti-stiction effect is characterized by calibrating the detachment lengths of released cantilevers and water contact angle on the modified surface. The experimental results show that the detachment length is almost twice longer than the cantilevers without modified substrate, where the interfacial surface energy between solids is reduced about fifteen times. Besides, polysilicon with a nearly hydrophobic surface is obtained after the modification process.
Sponsorship	Microelectromechanical Systems
Starting Page	189
Ending Page	194
Page Count	6
File Format	PDF
ISBN	0791836428
DOI	10.1115/IMECE2002-39299
Volume Number	Microelectromechanical Systems
Conference Proceedings	ASME 2002 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2002-11-17
Publisher Place	New Orleans, Louisiana, USA
Access Restriction	Subscribed
Subject Keyword	Surface modification Stiction Roughness Rie Reactive-ion etching Surface roughness
Content Type	Text
Resource Type	Article

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