NDLI: A Novel Embedded Root Method to Construct Thick Metal Microstructures Using SU-8 in UV-LIGA Process

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Ho, Chien-Hung Chin, Kan-Ping
Copyright Year	2002
Abstract	To upgrade the electrostatic force, movable devices in micro-electro-mechanical systems may require three-dimensional microstructures with large capacitive areas and vertical sidewalls with several hundred micrometers in height. The photoresist, NANO™ XP SU–8, can be implemented in the fabrication of high-aspect-ratio microstructures in low-cost MEMS production. In this study, using SU-8 as an electroplating mold, an improved method for consolidating the adhesion of the plated microstructures to the substrate is utilized. By constructing an embedded root as the substructure, this novel technique can greatly increase the thickness of the metal components, and simultaneously, the hard-to-strip crosslinked SU-8 may be removed completely. The fabrication of stators and bearing post for an electrostatic micro motor is used here to demonstrate the effectiveness of the proposed method, where the structural height and the minimum gap of the stators are 300 μm and 50 μm, respectively. For comparison, some fabricated results of typical approaches by a heated remover to strip the cured SU-8 mold are also shown in this paper.
Sponsorship	Microelectromechanical Systems
Starting Page	359
Ending Page	363
Page Count	5
File Format	PDF
ISBN	0791836428
DOI	10.1115/IMECE2002-33391
Volume Number	Microelectromechanical Systems
Conference Proceedings	ASME 2002 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2002-11-17
Publisher Place	New Orleans, Louisiana, USA
Access Restriction	Subscribed
Subject Keyword	Micromotor Uv-liga Su-8 Root construction Liga-like Microelectromechanical systems Strips Construction Bearings Metals Electroplating Adhesion Micromotors Ultraviolet radiation Metalwork Stators Photoresists Manufacturing
Content Type	Text
Resource Type	Article

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