NDLI: A Micromachined Combustor and Its Application to Micro Thermoelectric Power Generation

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Zhang, Chunbo Najafi, Khalil Luis, P. Bernal Peter, D. Washabaugh
Copyright Year	2002
Abstract	This paper reports a micromachined combustor and its application to micro thermoelectric power generation. The combustor chamber is covered by a ∼1.3μm thick dielectric diaphragm which is supported by a silicon support rim bonded to a glass substrate. The diaphragm is coated with Pt-catalyst and incorporates a heater for ignition. Scaling effects on self-sustained catalytic combustion are investigated for a square combustor chamber. The small size limit for self-sustained combustion at a hydrogen flow rate of ∼3sccm is found to be between 1 to 2mm. Very large temperature gradients can be achieved on diaphragm because of its low thermal conductance and the high combustion temperature. This combustor configuration is used in a micro thermoelectric power generation chip. The output power level of the generator has been measured to be ∼3μW/thermocouple at a hydrogen flow rate of 3.1sccm.
Sponsorship	Microelectromechanical Systems
Starting Page	1
Ending Page	6
Page Count	6
File Format	PDF
ISBN	0791836428
DOI	10.1115/IMECE2002-33272
Volume Number	Microelectromechanical Systems
Conference Proceedings	ASME 2002 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2002-11-17
Publisher Place	New Orleans, Louisiana, USA
Access Restriction	Subscribed
Subject Keyword	Thermoelectric Diaphragm Micromachined combustor Power generation Self-sustained combustion Energy generation Combustion Diaphragms (mechanical devices) Combustion chambers Diaphragms (structural) Micromachining
Content Type	Text
Resource Type	Article

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