NDLI: Fabrication and Testing of a MEMS Low-Flow Meter

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Sheppard, Jason Clendenin, Jason Chiu, Edward Tung, Steve
Copyright Year	2002
Abstract	A compact MEMS flowmeter was fabricated and tested for small gas flow rates from 0.5 to 10 sccm. The flowmeter was fabricated by integrating a silicon chip consisting of three surface-micromachined sensor clusters with a 60μm tall, 1.25 mm wide, and 10 mm long flow channel. Each sensor cluster in the chip consists of a pressure sensor, a surface shear stress sensor, and a temperature sensor. As gas flows through the channel, the volumetric flow rate is determined by measuring either the pressure drop in the flow direction or the local surface shear stress. The temperature sensors in the clusters mainly function as a reference for temperature compensating of the thermally based shear stress sensors. The flowmeter was calibrated in an open-loop pipe-flow facility using nitrogen as the gas medium. Based on the test results, it is clear that the pressure sensors, while capable of handling high flow rates, do not have the necessary precision level for small flow measurements. By comparison, the shear stress sensors, after proper temperature compensation, provide consistent and repeatable measurements for small flow rates. Additionally, the voltage output of the shear stress sensors also follows the 1/3 power trend, previously predicted for macro flow situations, in the small flow range tested.
Sponsorship	Microelectromechanical Systems
Starting Page	437
Ending Page	442
Page Count	6
File Format	PDF
ISBN	0791836428
DOI	10.1115/IMECE2002-33777
Volume Number	Microelectromechanical Systems
Conference Proceedings	ASME 2002 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2002-11-17
Publisher Place	New Orleans, Louisiana, USA
Access Restriction	Subscribed
Subject Keyword	Microelectromechanical systems Pressure sensors Temperature Pipe flow Flow measurement Micromachining Nitrogen Flow (dynamics) Silicon chips Temperature sensors Gas flow Pressure drop Shear stress Flowmeters Manufacturing Sensors Testing
Content Type	Text
Resource Type	Article

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