NDLI: Design and simulation of a variable MEMS capacitor for tunable HMSIW resonator

Content Provider	IET Digital Library
Author	Saberhosseini, Seyyedeh Shirin Ganji, Bahram Azizollah Koohsorkhi, Javad Ghorbani, Ayaz
Abstract	Here, a new design of a variable micro electromechanical system (MEMS) capacitor is introduced to use in telecommunication systems. For the first time, an on-chip MEMS component has been used in the substrate integrated waveguide (SIW) structures to avoid discrete and non-integrated connection problems and high noise levels and affects the operating frequency of telecommunication systems. The behaviour of two capacitors with the fixed–fixed and supported membrane by special spiral arms is analysed and simulated using the finite element method. The MEMS bridges are implemented by a 6 μm gold layer and an air gap of 3 μm. It can be seen that using the new special arms, the movement of the membrane is more uniform than the clamped while the actuation voltage is up to 1.32 V and the tuning range of the capacitor is 29%. Then both the capacitors are placed on half-mode SIW structure and the electromagnetic simulation is done. Finally, the results comparison shows that the frequency tuning range of the MEMS variable capacitor is more significant than the other.
Starting Page	707
Ending Page	712
Page Count	6
ISSN	1751858X
Volume Number	14
e-ISSN	17518598
Issue Number	Issue 5, Aug (2020)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/iet-cds/14/5
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/iet-cds.2019.0511
Journal	IET Circuits, Devices & Systems
Publisher Date	2020-03-10
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	Capacitor Design And Modelling of MEMS And NEMS Device Electromagnetic Simulation Finite Element Analysis Finite Element Method Frequency Tuning Range Half-mode SIW Structure MEMS Bridges MEMS Variable Capacitor Microelectromechanical System Capacitor Micromechanical Device On-chip MEMS Component Resonator Special Spiral Arms Substrate Integrated Waveguide Substrate Integrated Waveguide Structure Telecommunication System Tunable HMSIW Resonator Variable MEMS Capacitor Voltage 1.32 V Waveguide And Microwave Transmission Line Waveguide And Microwave Transmission Line Component
Content Type	Text
Resource Type	Article
Subject	Control and Systems Engineering Electrical and Electronic Engineering

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