NDLI: 19.5 μW ultra-low-power 13.56 MHz RFID tag based on transparent zinc-oxide thin-film transistors

Content Provider	IET Digital Library
Author	Ma, Xiaoyu Han, Yan Han, Leixiao Ye, Zhi
Abstract	A novel systematic technological process for ZnO-thin-film transistors (TFTs) fabrication was developed which turned out to achieve near-zero threshold voltage devices with good performance and stability. A deuterium implantation method was realised as well to fabricate depletion n-type ZnO TFTs. The inverters based on enhancement/depletion ZnO TFTs reached nearly full swing (0.01–5 V at 5 V V DD) and pretty large noise margin (V NML = 1.01 and V NMH = 3.61 V). Moreover, a transparent radio-frequency identification (RFID) tag chip based on ZnO TFTs was developed. This tag with an anti-collision algorithm for ISO-14443 type-A was first realised under 5 µm ZnO-TFT technology. The proposed RFID tag exhibits ultra-low-power dissipation of <19.5 µW at 3 V V DD and a reasonable chip area of 4.7 mm2.
Starting Page	674
Ending Page	679
Page Count	6
ISSN	1751858X
Volume Number	14
e-ISSN	17518598
Issue Number	Issue 5, Aug (2020)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/iet-cds/14/5
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/iet-cds.2019.0406
Journal	IET Circuits, Devices & Systems
Publisher Date	2020-03-03
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	Deuterium Implantation Method Electrical/electronic Equipment Energy Utilisation Field Effect Device Frequency 13.56 MHz II-VI SemiConductor ISO-14443 Type-A Low Power Electronics N-type ZnO TFT Near-zero Threshold Voltage Device Radiofrequency Identification RFID System RFID Tag Thin Film Transistors Transparent Radio-frequency Identification Tag Chip Transparent Zinc-oxide Thin-film Transistors Ultralow-power Dissipation Voltage 0.01 V to 5.0 V Wide Band Gap SemiConductor Zinc Compound Zno ZnO-TFT Technology ZnO-thin-film Transistors Fabrication
Content Type	Text
Resource Type	Article
Subject	Control and Systems Engineering Electrical and Electronic Engineering

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