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| Content Provider | IET Digital Library |
|---|---|
| Author | Guan, Yong Ma, Shenglin Zeng, Qinghua Chen, Jing Jin, Yufeng |
| Abstract | A fine-pitch through-silicon via integration approach with self-aligned back-side benzocyclobutene passivation layer is proposed. Different from the conventional lithographic process, the passivation layer is realised by leveraging plasma etching and chemical-mechanical polishing process. With its well-controlled repeatability, this approach can help reduce the process defect and copper contamination. A plenty of measurement techniques including X-ray radiographic testing, optical and scanning electron microscope observation, four-probe electrical measurement, as well as vector network analyser, are employed in order to verify the fabrication quality and the electrical performances. All the test results support that this fine-pitch through-silicon via integration approach has a promising application prospect. |
| Starting Page | 619 |
| Ending Page | 622 |
| Page Count | 4 |
| Volume Number | 11 |
| e-ISSN | 17500443 |
| Issue Number | Issue 10, Oct (2016) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/11/10 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2016.0267 |
| Journal | Micro & Nano Letters |
| Publisher Date | 2016-10-01 |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Back Side Benzocyclobutene Passivation Layer Chemical Mechanical Polishing Fine Pitch Through-silicon Via Integration Four Probe Electrical Measurement Layout Material Testing Modelling And Testing Optical Microscopy Organic Compound Passivation Plasma Etching Radiography Repeatability Scanning Electron Microscopy Self Aligned Benzocyclobutene Passivation Layer Semiconductor Integrated Circuit Design Semiconductor Technology Sputter Etching Surface Topography Measurement Three-dimensional Integrated Circuit Vector Network Analyser X-Ray Radiographic Testing |
| Content Type | Text |
| Resource Type | Article |
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