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| Content Provider | IET Digital Library |
|---|---|
| Author | Wang, Tao Kobayashi, Takeshi Lee, Chengkuo |
| Abstract | Piezoelectric micromachined ultrasonic transducer (pMUT) is gaining increasing research interest. It overcomes the inherent shortcomings of conventional bulk ultrasonic transducers such as acoustic impedance mismatching and poor sensitivity. In addition, pMUT does not require the extremely large input voltage as capacitive micromachined ultrasonic transducer. Therefore the pMUT is potential to be integrated into portable electronics. A pMUT array operated in air using the lead zirconate titanate (PZT) thin film polled by high voltage pulses is realised and fully investigated. The high voltage pulses are found to be more effective for PZT poling, where the piezoelectric constant d 31 is elevated to 105 pm/V. Benefited from such high performance PZT thin film and optimised structure, the fabricated pMUT (500 × 300 µm) achieves a displacement sensitivity of 807 nm/V at its resonant frequency (482 kHz) without DC offset. Compared with previously reported PZT pMUTs, the sensitivity is superior to them even with a smaller membrane. The in-air transmitting performance is also evaluated. A single pMUT element is able to generate 63.7 dB sound pressure level at 10 mm in air with only 2 V input. The proposed high performance pMUT shows its promise for practical applications in portable electronics. |
| Starting Page | 558 |
| Ending Page | 562 |
| Page Count | 5 |
| Volume Number | 11 |
| e-ISSN | 17500443 |
| Issue Number | Issue 10, Oct (2016) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/11/10 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2016.0207 |
| Journal | Micro & Nano Letters |
| Publisher Date | 2016-10-01 |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Acoustic Impedance Mismatching Capacitive Micromachined Ultrasonic Transducer Capacitive Transducers Displacement Sensitivity Frequency 482 KHz High Performance PZT Thin Film Highly Sensitive Piezoelectric Micromachined Ultrasonic Transducer In-air Transmitting Performance Lead Compound Lead Zirconate Titanate Thin Film Micromachining Microsensor Microsensors And Nanosensors Piezoelectric Constant Piezoelectric Thin Film Piezoelectric Transducer PMUT Array Portable Electronics PZT Resonant Frequency Sonic And Ultrasonic Transducers Ultrasonic Transducer Array Voltage 2 V Voltage Pulses |
| Content Type | Text |
| Resource Type | Article |
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