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The Journal of Engineering

Single and mechanically coupled capacitive silicon nanomechanical resonators

Content Provider	IET Digital Library
Author	Toan, Nguyen Van Shimazaki, Tsuyoshi Ono, Takahito
Abstract	The design, fabrication and evaluation of single and mechanically coupled capacitive silicon nanomechanical resonators is reported. The structure of resonators is fabricated on a silicon on insulator wafer and transferred to a Tempax glass substrate by anodic bonding. A finite element method simulation has been conducted to investigate the vibration modes of the resonators. Single beam resonator with a length of 21.3 μm, a width of 500 nm, a thickness of 5 μm and the capacitive gap size of about 300 nm shows a nonlinear response. The amplitude of frequency response increases as the frequency is swept upward, and then suddenly jumps to a lower value. The mechanically coupled capacitive silicon nanomechanical resonator with a number of 100 individual beams above is successfully fabricated. Some resonant peaks can be observed, which shows that most nanomechanical resonators are mechanically coupled and synchronised. A mechanical resonance at a high frequency of ∼7.2 MHz in flexural mode has been detected. A small motional resistance of 1.2 kΩ has been achieved by the mechanical coupling.
Starting Page	591
Ending Page	594
Page Count	4
Volume Number	11
e-ISSN	17500443
Issue Number	Issue 10, Oct (2016)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/mnl/11/10
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/mnl.2016.0265
Journal	Micro & Nano Letters
Publisher Date	2016-10-01
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	Anodic Bonding Design And Modelling of MEMS And NEMS Device Elemental Semiconductor Fabrication of MEMS And NEMS Device Finite Element Analysis Finite Element Method Simulation Frequency Response Frequency Response Amplitude Mechanical Resonance Mechanically Coupled Capacitive Silicon Nanomechanical Resonator Micromechanical Resonator Nanoelectromechanical Device Nanofabrication Nonlinear Response Resistance 1.2 Kohm Silicon Silicon on Insulator Wafer Silicon-on-insulator Single Beam Resonator Single Coupled Capacitive Silicon Nanomechanical Resonator Size 21.3 Mum Size 300 Nm Size 5 Mum Size 500 Nm Tempax Glass Substrate Vibration Mode Vibrations
Content Type	Text
Resource Type	Article

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