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| Content Provider | IET Digital Library |
|---|---|
| Author | Vinh, Nguyen Thanh Omiya, Tomoki Tsukagoshi, Takuya Hirayama, Kayoko Noda, Kentaro Matsumoto, Kiyoshi Shimoyama, Isao |
| Abstract | A high-sensitivity tri-axis force sensor designed to measure the traction force of a single cell is reported. The developed sensor consists of a micropillar that is supported by a cross-shaped Si structure and a double-layer photoresist cap. The piezoresistors formed on the Si structure allow for the simultaneous measurement of the normal and shear forces acting on the micropillar. Moreover, the cap prevents the cells from contacting the Si structure, which is not desirable when measuring the force acting on the micropillar. The effect of the culture medium on the impedance of the sensor and the noise level of the measurement circuit was evaluated. The temperature effect was compensated using a piezoresistor that does not possess a through-hole underneath. For measurement, inside a culture medium, the resolution of the sensor obtained from the standard deviations of the measured signals was less than 2 nN. Finally, it was demonstrated that the sensor is capable of measuring the traction force in three dimensions generated by an osteosarcoma cell when it detaches from the micropillar under trypsin treatment. |
| Starting Page | 563 |
| Ending Page | 567 |
| Page Count | 5 |
| Volume Number | 11 |
| e-ISSN | 17500443 |
| Issue Number | Issue 10, Oct (2016) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/11/10 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2016.0246 |
| Journal | Micro & Nano Letters |
| Publisher Date | 2016-10-01 |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Cellular Traction Force Monitoring Compensation Cross-shaped Si Structure Double-layer Photoresist Cap Elemental Semiconductor Fabrication of MEMS And NEMS Device Force Measurement Force Sonsor Lithography Measurement of Mechanical Variables Mechanical Variables Measurement Microelectromechanical System Microfabrication Micromechanical And Nanomechanical Device And System Micropillar Microsensor Microsensors And Nanosensors Normal Force Measurement Osteosarcoma Cell PhotoDetector Photoelectric Device Photoresistors Photoresists Piezoresistive Device Piezoresistor Semiconductor Technology Sensing And Detecting Device Shear Force Measurement Silicon Single Cell Traction Force Measurement Traction Triaxis Force Sensor Trypsin Treatment |
| Content Type | Text |
| Resource Type | Article |
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