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| Content Provider | IET Digital Library |
|---|---|
| Author | Wang, De Bo Liao, Xiaoping |
| Abstract | The effect of temperature on thermoelectric microwave power sensors is researched in order to extend its application field. The fabrication of this microwave power sensor is divided into a front side and a back side processing using GaAs MMIC process and MEMS technology. The measurement results show that the temperature has a significant effect on the performance of thermoelectric microwave power sensors. The obtained temperature coefficient is about 0.488 mV/(W · K), which has an important reference value for the thermoelectric microwave power sensors. The reason is that the accuracy of microwave power measurement will be realised as long as the environment temperature is tracked. |
| Starting Page | 1462 |
| Ending Page | 1464 |
| Page Count | 3 |
| ISSN | 00135194 |
| Volume Number | 49 |
| e-ISSN | 1350911X |
| Issue Number | Issue 23, Nov (2013) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/el/49/23 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/el.2013.1769 |
| Journal | Electronics Letters |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Electrical Instruments And Technique Fabrication of MEMS And NEMS Device GaAs Gallium Arsenide III-V SemiConductor MEMS Technology Micromechanical And Nanomechanical Device And System Microsensor Microsensors And Nanosensors Microwave IC Microwave Measurement Technique Microwave Power Measurement MMIC MMIC Technology Power And Energy Measurement Power Measurement Sensing And Detecting Device Temperature Characteristic Temperature Coefficient Temperature Sonsor Thermal Variables Measurement Thermoelectric Microwave Power Sensor Thermometry Thermopiles |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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