Please wait, while we are loading the content...
Please wait, while we are loading the content...
| Content Provider | IET Digital Library |
|---|---|
| Author | Wang, Hairong Wang, Mengya Lei, Weitao Chen, Xiaowei Huang, Hao Wang, Jiuhong |
| Abstract | An integrated alcohol microgas sensor was designed and fabricated based on TiO2/SnO2 nanocomposites acting as a sensing layer and microheater providing working temperature. The stacked TiO2/SnO2 nanocomposites were prepared by magnetron sputtering. A unique suspended membrane consisting of Si3N4/SiO2/Si3N4/SiO2 four layers was prepared by different methods, respectively, and applied in microheater to support the electrodes and sensing layer for reducing power consumption. The fabrication process tackled the difficulty that the sensing layer preparation is incompatible with microelectromechanical systems micromachining technology and realised the mass production of the wafer-level sensor chips with good consistency. The microalcohol sensors showed excellent response characteristics for alcohol (50–600 ppm) detection at low power consumption (39 mW). |
| Starting Page | 11 |
| Ending Page | 16 |
| Page Count | 6 |
| Volume Number | 14 |
| e-ISSN | 17500443 |
| Issue Number | Issue 1, Jan (2019) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/14/1 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2018.5183 |
| Journal | Micro & Nano Letters |
| Publisher Date | 2019-01-16 |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Alcohol Detection Biological Transport Cellular And Subcellular Transmembrane Physics Chemical Sensor Chemical Variables Measurement Deposition by Sputtering Design And Modelling of MEMS And NEMS Device Electrochemical Electrodes Electrochemistry And Electrophoresis Electrode Emulsions And Suspensions Fabrication of MEMS And NEMS Device Gas Sonsor Low Power Consumption Integrated Alcohol Microgas Sensor Magnetron Sputtering Membranes Microelectromechanical System Micromachining Technology Microheater Micromachining Micromechanical And Nanomechanical Device And System Microsensor Microsensors And Nanosensors Nanocomposite Nanosensor Organic Compound Power 39.0 MW Power And Energy Measurement Power Consumption Power Measurement Sputter Deposition Suspended Membrane Suspensions Temperature Measurement Temperature Sonsor Thermal Variables Measurement Thermometry Tin Compound TiO2-SnO2 Titanium Compound Wafer-level Fabrication Wafer-level Sensor Chips |
| Content Type | Text |
| Resource Type | Article |
National Digital Library of India (NDLI) is a virtual repository of learning resources which is not just a repository with search/browse facilities but provides a host of services for the learner community. It is sponsored and mentored by Ministry of Education, Government of India, through its National Mission on Education through Information and Communication Technology (NMEICT). Filtered and federated searching is employed to facilitate focused searching so that learners can find the right resource with least effort and in minimum time. NDLI provides user group-specific services such as Examination Preparatory for School and College students and job aspirants. Services for Researchers and general learners are also provided. NDLI is designed to hold content of any language and provides interface support for 10 most widely used Indian languages. It is built to provide support for all academic levels including researchers and life-long learners, all disciplines, all popular forms of access devices and differently-abled learners. It is designed to enable people to learn and prepare from best practices from all over the world and to facilitate researchers to perform inter-linked exploration from multiple sources. It is developed, operated and maintained from Indian Institute of Technology Kharagpur.
Learn more about this project from here.
NDLI is a conglomeration of freely available or institutionally contributed or donated or publisher managed contents. Almost all these contents are hosted and accessed from respective sources. The responsibility for authenticity, relevance, completeness, accuracy, reliability and suitability of these contents rests with the respective organization and NDLI has no responsibility or liability for these. Every effort is made to keep the NDLI portal up and running smoothly unless there are some unavoidable technical issues.
Ministry of Education, through its National Mission on Education through Information and Communication Technology (NMEICT), has sponsored and funded the National Digital Library of India (NDLI) project.
| Sl. | Authority | Responsibilities | Communication Details |
|---|---|---|---|
| 1 | Ministry of Education (GoI), Department of Higher Education |
Sanctioning Authority | https://www.education.gov.in/ict-initiatives |
| 2 | Indian Institute of Technology Kharagpur | Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project | https://www.iitkgp.ac.in |
| 3 | National Digital Library of India Office, Indian Institute of Technology Kharagpur | The administrative and infrastructural headquarters of the project | Dr. B. Sutradhar bsutra@ndl.gov.in |
| 4 | Project PI / Joint PI | Principal Investigator and Joint Principal Investigators of the project |
Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon |
| 5 | Website/Portal (Helpdesk) | Queries regarding NDLI and its services | support@ndl.gov.in |
| 6 | Contents and Copyright Issues | Queries related to content curation and copyright issues | content@ndl.gov.in |
| 7 | National Digital Library of India Club (NDLI Club) | Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach | clubsupport@ndl.gov.in |
| 8 | Digital Preservation Centre (DPC) | Assistance with digitizing and archiving copyright-free printed books | dpc@ndl.gov.in |
| 9 | IDR Setup or Support | Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops | idr@ndl.gov.in |
|
Loading...
|