NDLI: Research on a Ka-Band MEMS Power Sensor Investigated with an MEMS Cantilever Beam

Content Provider	IET Digital Library
Author	Wang, Debo Gu, Xinfeng Xie, Jiangcheng Zhang, Dong
Abstract	In this work, a novel high overload Ka-band power sensor with a Micro-electro-mechanical system (MEMS) cantilever beam is investigated in order to improve the measurement dynamic range and the bandwidth.The fabrication of the Ka-band power sensor is divided into front side and back side processing with a combination of surface and bulk micromachining of GaAs.The low-power measurement reveals that the terminating-type sensitivity is close to 0.081, 0.076 and 0.072mV/mW at 34, 35 and 36GHz, respectively. The high-power measurement indicates that the capacitivetype sensitivity is around 4.9fF/W at Ka-band. The overload power measurements show that the MEMS cantilever beam can improve the dynamic range by increasing the top end of the range into no less than 200mW, and enhance the bandwidth by increasing the top end of the range into no less than 36GHz. There is an important reference value to achieve the high overload and wide frequency band for the thermoelectric microwave power sensors.
Starting Page	378
Ending Page	384
Page Count	7
ISSN	10224653
Volume Number	29
e-ISSN	20755597
Issue Number	Issue 2, Mar (2020)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/cje/29/2
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/cje.2020.02.002
Journal	Chinese Journal of Electronics
Publisher Date	2020-03-01
Access Restriction	Open
Rights Holder	© Chinese Institute of Electronics
Subject Keyword	Cantilevers Capacitance Measurement Capacitive Sensor Fabrication of MEMS And NEMS Device Frequency 34.0 GHz Frequency 35.0 GHz Frequency 36.0 GHz GaAs Gallium Arsenide III-V SemiConductor Impedance And Admittance Measurement Ka-band MEMS Power Sensor MEMS Cantilever Beam Microelectromechanical System Cantilever Beam Micromachining Microsensor Microsensors And Nanosensors Microwave Circuit And Device Microwave Measurement Technique Millimetre Wave Detector Millimetre Wave Measurement Overload Power Measurement Power And Energy Measurement Power Measurement Thermoelectric Microwave Power Sonsor
Content Type	Text
Resource Type	Article
Subject	Applied Mathematics Electrical and Electronic Engineering

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