NDLI: Research on Measurement Accuracy of the Double-Channel Microwave Power Sensors Based on an MEMS Cantilever Beam

Content Provider	IET Digital Library
Author	G, Debo W A N U, Lele W I, Longfei L I, Ruiping D A
Abstract	A thermopile-based microwave power sensor and a double-channel microwave power sensor are compared in order to research the measurement accuracy of microwave power. The relationship of the displacement of MEMS cantilever beam with the measured microwave power is researched, and the reason that the microwave power consumed by the MEMS cantilever cannot be ignored at low power level is explained. The ratio of microwave power consumed by the MEMS cantilever with the microwave frequency is obtained, and the measured results show that the percentage is 51.96%@8GHz, 52.31%@10GHz and 55.11%@12GHz on the average, respectively. There is an important reference value to achieve the accurate microwave power measurement of the double-channel microwave power sensors.
Starting Page	916
Ending Page	919
Page Count	4
ISSN	10224653
Volume Number	28
e-ISSN	20755597
Issue Number	Issue 5, Sep (2019)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/cje/28/5
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/cje.2019.06.011
Journal	Chinese Journal of Electronics
Publisher Date	2019-09-01
Access Restriction	Open
Rights Holder	© Chinese Institute of Electronics
Subject Keyword	Cantilevers Double-channel Microwave Power Sensor Electrical Instruments And Technique Frequency 10.0 GHz Frequency 12.0 GHz Frequency 8.0 GHz MEMS And NEMS Device Technology MEMS Cantilever Beam Micromechanical And Nanomechanical Device And System Microsensor Microsensors And Nanosensors Microwave Circuit And Device Microwave Detector Microwave Measurement Technique Microwave Power Consumption Microwave Power Measurement Power And Energy Measurement Power Consumption Power Measurement Sensing And Detecting Device Temperature Measurement Temperature Sonsor Thermal Variables Measurement Thermometry Thermopile-based Microwave Power Sensor Thermopiles
Content Type	Text
Resource Type	Article
Subject	Applied Mathematics Electrical and Electronic Engineering

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