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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Aldarouich, A. Haiwen Yuan Ali, M. Jiaoying Huang |
| Copyright Year | 2009 |
| Description | Author affiliation: School of Instrumentation Science & Opto-Electronics Engineering, Beihang University, Beijing 100191, China (Ali, M.) || School of Automation Science and Electrical Engineering, Beihang University, Beijing 100191, China (Aldarouich, A.; Haiwen Yuan; Jiaoying Huang) |
| Abstract | Based on the sensing mechanism of microsensor, a simulation model of a practical silicon beam resonator attached to an E-type round diaphragm and used for measuring pressure is established. The relationship between the basic natural frequency of the beam resonator and the pressure is calculated, analyzed and investigated. As a microsensor FEM is used to study some important simulation results on the vibration features of the beam resonators. Based on the differential output signals, a set of optimum parameters of the proposed sensing unit is determined. |
| File Size | 114424 |
| File Format | |
| ISBN | 9781424438631 |
| DOI | 10.1109/ICEMI.2009.5274091 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-08-16 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | beam E-type round diaphragm Instruments Sensor phenomena and characterization finite-element method pressure Intelligent sensors Stress microsensor Mechanical sensors Temperature sensors Frequency Silicon Resonance Pressure measurement |
| Content Type | Text |
| Resource Type | Article |
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