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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Acuautla, M. Bernardini, S. Bendahan, M. Pietri, E. |
| Copyright Year | 2014 |
| Description | Author affiliation: Aix - Marseille Univ., Marseille, France (Acuautla, M.; Bernardini, S.; Bendahan, M.) || Genes'Ink, Rousset, France (Pietri, E.) |
| Abstract | ZnO nanoparticles thin films were deposited with different thicknesses on Kapton flexible substrates by drop coating method. The flexible platform consists in Ti/Pt interdigitated electrodes for gas detection and a heater device fabricated by Magnetron Sputtering and photolithography process. The thickness effects of the ZnO thin film on the gas sensing properties by ozone exposure at 200 °C has been studied. In order to test a deposit methodology used in large scale industrial production, an ultrasonic spray deposition was done. It was found that the sensitivity towards ozone gas is strongly dependent of the ZnO thin film thicknesses. |
| Starting Page | 1 |
| Ending Page | 4 |
| File Size | 349300 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781479949946 |
| DOI | 10.1109/PRIME.2014.6872703 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2014-06-30 |
| Publisher Place | France |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Temperature sensors Gases Films flexible substrate gas sensor Zinc oxide thin film Gas detectors Substrates ozone |
| Content Type | Text |
| Resource Type | Article |
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