NDLI: Analysis of probe current in scanning electron microscopy

Content Provider	IEEE Xplore Digital Library
Author	Sun-Jong Lim Chan-Hong Lee
Copyright Year	2008
Description	Author affiliation: Intell. Manuf. Syst. Res. Div., KIMM, Daejeon (Sun-Jong Lim; Chan-Hong Lee)
Abstract	Probe current means an electron beam focused on a specimen. Working with the specimen, probe current emits electrons containing information on the specimen such as secondary electrons and backscattered electrons. The size of probe current determines the number of secondary electrons and backscattered electrons emitted. Probe current is determined by the size of the probe, which is directly related with the number and size of apertures and the control current of the condenser lens. In case of SEM that acquires images using secondary electrons, if the size of probe current is large, the brightness of images is high but their resolution is low. On the contrary, if the size of probe current is small, the resolution of images is high but their brightness is low. Thus, probe current should be decided suitably for specimens to be observed. The present study attempts to measure probe current for images obtained using designed aperture and the control current of the condenser lens, and utilize the measurements as model data for improving the assembly state of the columns and the quality of images and for designing the control current of lenses.
Starting Page	1200
Ending Page	1203
File Size	986623
Page Count	4
File Format	PDF
ISBN	9788995003893
DOI	10.1109/ICCAS.2008.4694330
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-14
Publisher Place	South Korea
Access Restriction	Subscribed
Rights Holder	ICROS
Subject Keyword	Scanning electron microscopy Image resolution Brightness Faraday cup Condenser lens Probe current Objective lens Optical design Electron beams Current measurement Apertures Electron emission Probes Lenses
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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